[Photolithography Part5] Multiple Patterning Technology (MPT)

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  • เผยแพร่เมื่อ 20 ก.ย. 2024

ความคิดเห็น • 10

  • @leongsengcheong4194
    @leongsengcheong4194 11 หลายเดือนก่อน +3

    Great animation, Thanks for the contribution to semiconductor learning videos

    • @SemiSlides
      @SemiSlides  10 หลายเดือนก่อน +1

      Glad you enjoyed the show! Animation meets innovation at SemiSlides. More pixel-packed knowledge coming your way! 🎥🏔

  • @Lyeean
    @Lyeean 8 หลายเดือนก่อน +2

    Thanks for your sharing, it halps me alot

    • @SemiSlides
      @SemiSlides  8 หลายเดือนก่อน +1

      I appreciate you sharing your experience; it feels like you've sneaked into the VIP section of the semiconductor symphony! With insights rivaling the scripts of field engineer training at major semiconductor firms, you're practically ready to teach the transistors to tango. Keep on sparking curiosity in the electrifying world of tiny tech, where every bit of knowledge is a byte-sized adventure!

  • @nitinmanware8773
    @nitinmanware8773 7 หลายเดือนก่อน +2

    Thanks for the detailed session on Multipatterning. I have a query related to design file. Does the cad/design file (gds/oasis) contain layers of target layout only or does it contain all the multipatterning related layers

    • @SemiSlides
      @SemiSlides  6 หลายเดือนก่อน +2

      The design file, particularly in formats like GDSII or OASIS, plays a crucial role in the semiconductor manufacturing process, especially when it comes to multipatterning techniques. These files are primarily intended to provide the layout for mask writers, ultimately aiming to decompose the target layout into a form that corresponds to a single mask layout. This decomposition is essential because, in the context of multipatterning, the target layout layer is intricately divided, or decomposed, into multipatterning-related layers to achieve the desired resolution and pattern density on the semiconductor wafer.
      To directly address your query, the design file does indeed include both the target layout layers and all the multipatterning-related layers. This is a critical aspect of modern semiconductor fabrication, where multipatterning techniques are employed to overcome the limitations of photolithography by enabling finer feature sizes and greater pattern densities than would be possible with a single patterning process.
      The process of decomposing the target layout into multipatterning-related layers is a sophisticated task. It involves deciding whether to split the target layout into two colors (as in double patterning), three colors, or to use techniques like Self-Aligned Double Patterning (SADP) among others. This decomposition is guided by advanced software tools provided by companies like Synopsys. These tools analyze the target layout and determine the most efficient way to decompose it into multiple patterns that can be individually processed and later merged to form the final, complex structures on the wafer.
      This decomposition is not arbitrary but is a highly technical decision-making process that takes into account the limitations of the photolithography equipment, the physical and chemical properties of the materials involved, and the ultimate goals of the semiconductor device being manufactured. By employing such advanced decomposition strategies, manufacturers can ensure that the final mask layout, as represented in the GDSII or OASIS file, accurately reflects the multipatterned design necessary for fabricating advanced semiconductor devices.
      For those seeking a deeper dive into the specifics of double patterning and its role in semiconductor fabrication, "Design Rules in a Semiconductor Foundry" by Eitan N. Shauly, published in 2022, is an invaluable resource. Particularly, the discussion on double patterning found between pages 42 and 68 offers detailed insights into how target layouts are decomposed into multipatterning-related layers, highlighting the critical role of software tools in this process. This book section is recommended for anyone looking to understand the intricacies of multipatterning and its impact on the design and fabrication of semiconductor devices.

    • @nitinmanware8773
      @nitinmanware8773 6 หลายเดือนก่อน +2

      Thanks ​@@SemiSlides

  • @sudipdas5960
    @sudipdas5960 5 หลายเดือนก่อน +1

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    • @SemiSlides
      @SemiSlides  5 หลายเดือนก่อน +1

      Absolutely, thanks for pointing that out! 🌟 Including the slides link in the description is a fantastic suggestion for those who want to explore deeper.
      Also, using the ChatGPT Chrome extension to get summaries is super clever! For an enhanced learning experience, check out the extension here: chromewebstore.google.com/detail/youtube-summary-with-chat/nmmicjeknamkfloonkhhcjmomieiodli
      Keep those brilliant ideas coming, Silicon Pioneers! 😎👍

    • @sudipdas5960
      @sudipdas5960 5 หลายเดือนก่อน +1

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