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SemiSlides
United States
เข้าร่วมเมื่อ 14 เม.ย. 2023
"Welcome aboard the SemiSlides express! 🚀 Your personal guide through the silicon jungle, led by the illustrious Dr. SemiSherpa, who's not only got a 20-year trek through the semiconductor wilderness but also a PhD to his name. With expertise steeped in material engineering, a dash of chemistry wizardry, the solid grounding of physics, and the live wire of electrical engineering, he's got all your scientific bases covered. Ready to slide into complex concepts with the ease of a seasoned pro? Join us on this electrifying ride through the world of semiconductors. It's going to be elemental, educational, and above all, electrifying! 🏔️⚛️💡"
[CMP Part4] CMP Slurry & Mechanism (1 of 2)
Welcome back, Silicon Pioneers! I’m your guide, Semi Sherpa, and I’m thrilled to continue our deep dive into the fascinating world of semiconductors, with today’s focus on CMP slurry and its mechanisms. In this episode, we’ll uncover how this essential component drives the precision and effectiveness of the Chemical Mechanical Planarization (CMP) process, which is critical in fabricating high-performance semiconductor devices.
This is Episode 4 in our CMP series. In Episode 1, we introduced the importance of CMP in device manufacturing. Episode 2 explored the mechanics that make CMP possible, and Episode 3 delved into the key consumables that support the CMP process. Now, we’re turning our attention to CMP slurry-a vital component that plays a pivotal role in achieving the desired wafer surface characteristics. In the upcoming final episodes, we’ll cover post-cleaning techniques and defect control strategies.
Let’s dive into today’s topic-CMP slurry. This episode is designed to provide a clear overview of CMP slurry and its role in semiconductor fabrication. We’ve divided it into three main sections to guide you through each aspect.
We’ll begin by examining CMP abrasives, discussing their key properties and how they’re produced. You’ll learn about different abrasive materials and the critical control of shape and size to optimize material removal rate (MRR), selectivity, and minimize scratch defects.
Next, we’ll explore the dielectric CMP process, focusing on partial CMP and stopping CMP. This section will highlight the unique roles of silica and ceria abrasives, explaining why ceria is now preferred for dielectric CMP due to its higher selectivity and removal rates.
Finally, we’ll look at metal CMP for materials like tungsten and copper, delving into how the slurry formulation aids in metal polishing and how specific additives enhance CMP performance for these materials.
We’ve crafted this episode to give you a foundational understanding of CMP slurry and polishing mechanisms in silicon device fabrication-essential knowledge for anyone interested in semiconductor manufacturing.
Thanks for joining us today, and stay tuned for more insights into the exciting world of CMP. If you’re ready to explore the different chapters of this video, feel free to click on the timestamps below.
1. CMP Slurry
[03:00] CMP Slurry: Bridging Material Innovation and Process Precision
[11:40] The Role of Abrasives in CMP: Selecting the Right Solution for Your Process
[17:35] Synthesis of Silica Abrasives: Fumed vs. Colloidal Silica
[21:35] Synthesis of Ceria Abrasives: Calcined vs. Wet Ceria
[25:15] CMP Slurry Types: The Key to Optimizing Semiconductor Processes
2. Dielectric (SiO2, Si3N4) CMP
[29:45] Oxide CMP Applications in Advanced Device Manufacturing
[37:35] CMP Mechanism of Silicon Oxide Films Using Silica Abrasives
[41:05] Ceria Abrasives in Oxide CMP: High Removal Rates and Selective Polishing
[47:15] The Rise of Ceria Abrasives in Dielectric CMP
[50:05] Optimizing CMP Slurry Stability with Dispersant Strategies for Scratch and Dishing Control
[55:50] Optimizing CMP Slurry with Additive Strategies for Selectivity and Dishing Control
[1:01:35] Planarization Capability: The Role of Silica, Ceria, and SSP Slurries
[1:06:30] Silicon Nitride CMP: A Key Process in Self-Aligned Contact Technology
[1:08:25] Selectivity Control of Simultaneous Multi-Material Polishing
This is Episode 4 in our CMP series. In Episode 1, we introduced the importance of CMP in device manufacturing. Episode 2 explored the mechanics that make CMP possible, and Episode 3 delved into the key consumables that support the CMP process. Now, we’re turning our attention to CMP slurry-a vital component that plays a pivotal role in achieving the desired wafer surface characteristics. In the upcoming final episodes, we’ll cover post-cleaning techniques and defect control strategies.
Let’s dive into today’s topic-CMP slurry. This episode is designed to provide a clear overview of CMP slurry and its role in semiconductor fabrication. We’ve divided it into three main sections to guide you through each aspect.
We’ll begin by examining CMP abrasives, discussing their key properties and how they’re produced. You’ll learn about different abrasive materials and the critical control of shape and size to optimize material removal rate (MRR), selectivity, and minimize scratch defects.
Next, we’ll explore the dielectric CMP process, focusing on partial CMP and stopping CMP. This section will highlight the unique roles of silica and ceria abrasives, explaining why ceria is now preferred for dielectric CMP due to its higher selectivity and removal rates.
Finally, we’ll look at metal CMP for materials like tungsten and copper, delving into how the slurry formulation aids in metal polishing and how specific additives enhance CMP performance for these materials.
We’ve crafted this episode to give you a foundational understanding of CMP slurry and polishing mechanisms in silicon device fabrication-essential knowledge for anyone interested in semiconductor manufacturing.
Thanks for joining us today, and stay tuned for more insights into the exciting world of CMP. If you’re ready to explore the different chapters of this video, feel free to click on the timestamps below.
1. CMP Slurry
[03:00] CMP Slurry: Bridging Material Innovation and Process Precision
[11:40] The Role of Abrasives in CMP: Selecting the Right Solution for Your Process
[17:35] Synthesis of Silica Abrasives: Fumed vs. Colloidal Silica
[21:35] Synthesis of Ceria Abrasives: Calcined vs. Wet Ceria
[25:15] CMP Slurry Types: The Key to Optimizing Semiconductor Processes
2. Dielectric (SiO2, Si3N4) CMP
[29:45] Oxide CMP Applications in Advanced Device Manufacturing
[37:35] CMP Mechanism of Silicon Oxide Films Using Silica Abrasives
[41:05] Ceria Abrasives in Oxide CMP: High Removal Rates and Selective Polishing
[47:15] The Rise of Ceria Abrasives in Dielectric CMP
[50:05] Optimizing CMP Slurry Stability with Dispersant Strategies for Scratch and Dishing Control
[55:50] Optimizing CMP Slurry with Additive Strategies for Selectivity and Dishing Control
[1:01:35] Planarization Capability: The Role of Silica, Ceria, and SSP Slurries
[1:06:30] Silicon Nitride CMP: A Key Process in Self-Aligned Contact Technology
[1:08:25] Selectivity Control of Simultaneous Multi-Material Polishing
มุมมอง: 402
วีดีโอ
[CMP Part3] CMP Consumables
มุมมอง 4092 หลายเดือนก่อน
Welcome back, Silicon Pioneers! I’m your guide, Semi Sherpa, and I’m excited to continue our deep dive into the world of semiconductors, with a special focus on the Chemical Mechanical Planarization (CMP) process. Today’s episode is all about the consumables that play a vital role in CMP, ensuring smooth and precise wafer surfaces for high-performance semiconductor devices. This is Episode 3 in...
[CMP Part2] CMP Mechanics (2 of 2)
มุมมอง 6672 หลายเดือนก่อน
Welcome to the exciting continuation of our enlightening CMP series, guided by me, your trusted host, Semi Sherpa, as we navigate the vast world of semiconductor technology. In this series, we are diving deep into the intricacies of the Chemical Mechanical Planarization (CMP) process, exploring its critical role across five key episodes. In the first episode, we introduced CMP and emphasized it...
[CMP Part2] CMP Mechanics (1 of 2)
มุมมอง 1.2K3 หลายเดือนก่อน
Welcome to the exciting continuation of our enlightening CMP series, guided by me, your trusted host, Semi Sherpa, as we navigate the vast world of semiconductor technology. In this series, we are diving deep into the intricacies of the Chemical Mechanical Planarization (CMP) process, exploring its critical role across five key episodes. In the first episode, we introduced CMP and emphasized it...
[CMP Part1] CMP Introduction (2 of 2)
มุมมอง 1.1K5 หลายเดือนก่อน
*Welcome to the Grand Opening of Our CMP Series, Guided by Semi Sherpa, Your Trusted Expert in the Semiconductor Cosmos* In this introductory episode, we aim to equip newcomers with essential knowledge about the Chemical Mechanical Polishing (CMP) process. Our episode is organized into four distinct segments, providing a comprehensive understanding of CMP: *1. The Importance of CMP in Modern Se...
[CMP Part1] CMP Introduction (1 of 2)
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Welcome to the grand opening of our enlightening CMP series, guided by Semi Sherpa, your trusted expert through the vast semiconductor cosmos. This introductory episode is tailored to provide essential knowledge for those new to the Chemical Mechanical Polishing, or CMP, process. Our episode is organized into four distinct segments to give you a comprehensive understanding of CMP: First, we wil...
[EUVL Part5] EUV Resist
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*Join Semi Sherpa, your trusted guide through the semiconductor cosmos, for the grand finale of our enlightening EUV photolithography series. In this climactic episode, we shed light on the vital role of EUV photoresist materials in advancing semiconductor manufacturing. We start by unraveling the essence of conventional chemically amplified resists (CAR) developed for deep UV lithography, high...
[Photolithography Part7] Photoresist
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*Welcome to the concluding episode of our comprehensive series on optical photolithography for silicon wafer semiconductor fabrication. In this final installment, we turn our focus to photoresist technology, a critical component that significantly impacts the performance of the lithography process. This episode delves into the complexities of photoresists, interlayers, and photochemicals, cover...
[EUVL Part4] EUV Mask
มุมมอง 6Kปีที่แล้ว
*Dive deeper into the intricacies of Extreme Ultraviolet Lithography (EUVL) with our ongoing series. This fourth episode shifts the focus towards EUV mask technology, a pivotal element in high-volume manufacturing (HVM). As we explore this critical component, we'll uncover how EUV masks differ from traditional optical masks and the unique challenges they bring to semiconductor fabrication. Belo...
[Photolithography Part6] Photomask (2 of 2)
มุมมอง 2.3Kปีที่แล้ว
*Welcome back to our in-depth exploration of photomask technology in optical lithography for silicon wafer semiconductor fabrication. Continuing from the first part of this sixth episode, where we examined the photomask fabrication process, we now shift our focus to the Front-End of Line (FEOL) metrology and the Back-End of Line (BEOL) processes. This segment is dedicated to delving deeper into...
[Photolithography Part6] Photomask (1 of 2)
มุมมอง 6Kปีที่แล้ว
*Welcome to the sixth episode of our series on optical photolithography, where we zoom in on photomask (reticle) technology-a foundational component shaping every pattern imprinted on silicon wafers. This episode is split into two parts; initially, we explore the intricate processes involved in the fabrication of photomasks within the Front-End of Line (FEOL) at the mask shop. Subsequently, we ...
[EUVL Part3] EUV Mirror
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*Welcome to our in-depth exploration of Extreme Ultraviolet Lithography (EUVL) for patterning on silicon wafers in semiconductor fabrication. Over the course of five episodes, we'll delve into every aspect of this revolutionary technology that is reshaping the modern lithography landscape. In this third episode, we explore the EUV mirrors that reflect EUV light from the source vessel to the res...
[EUVL Part2] ASML EUV Light Source
มุมมอง 3Kปีที่แล้ว
*Welcome to our in-depth exploration of Extreme Ultraviolet Lithography (EUVL) for patterning on silicon wafers in semiconductor fabrication. Over the course of five episodes, we'll delve into every aspect of this revolutionary technology that is reshaping the modern lithography landscape. In this second episode, we focus on the ASML EUV Light Source, a critical challenge in achieving High-Volu...
[EUVL Part1] From the Beginning to HVM
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*Welcome to our in-depth exploration of Extreme Ultraviolet Lithography (EUVL) for patterning on silicon wafers in semiconductor fabrication. Over the course of five episodes, we'll delve into every aspect of this revolutionary technology that is reshaping the modern lithography landscape. In this first episode, we explore the history of EUVL development, revealing insights into its basic worki...
[Photolithography Part5] Multiple Patterning Technology (MPT)
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*Welcome to the fifth installment of our in-depth exploration into optical photolithography for silicon wafer semiconductor fabrication. This episode dives into the sophisticated world of Multiple Patterning Technology (MPT), a crucial method in overcoming the limitations of traditional photolithography as device miniaturization pushes the boundaries of Rayleigh's equation. Despite the advances...
[Photolithography Par4] CD Measurement & Control
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[Photolithography Par4] CD Measurement & Control
[Photolithography Part3] Alignment & Overlay
มุมมอง 19Kปีที่แล้ว
[Photolithography Part3] Alignment & Overlay
[Photolithography Part1] Track (Coating & Develop)
มุมมอง 10Kปีที่แล้ว
[Photolithography Part1] Track (Coating & Develop)
Wow this is great thanks for sharing I have been working on these tool for a very long time really enjoyed videos
Amazing
Thanks for this exciting adventure into the world of semiconductors)
great work
I've been chasing videos of bloggers, very detailed content!! Looking forward to the later update on the etching process!
Thank you very much for this work👍. This is the best channel on TH-cam on semiconductor technology. I look forward to the next episodes.
I want to express my deepest gratitude for your incredible work and creativity! Your TH-cam videos are a true treasure trove of informative content, delivered in such a high-quality, engaging, and inspiring manner that each viewing turns into a fascinating journey. Your presentation style, the depth of your research, and your meticulous preparation make me eagerly look forward to every new release. Thank you for sharing your knowledge and ideas, helping viewers broaden their horizons and discover the world from new perspectives!
Your words mean the world to me, Silicon Pioneer! Your kind feedback fuels our passion for exploring the world of CMP.
I have spent more than a week on each one of your videos , I reverse search to find the research papers associated with your images. Can you please provide the name of the book for Figure 11.14 at 47:04
Thanks for your dedication to the channel, Silicon Pioneer! Spending a week per video and even reverse searching-wow, that's some next-level detective work! 🕵♂ The source you're looking for is C.A. Mack et al., “Modeling of solvent evaporation effects for hot plate baking of photoresist,” Proc. SPIE 2195, 584 (1994). But now I’m curious-why reverse search? Are you verifying, cross-referencing, or just unleashing your inner research ninja? Either way, it’s impressive!
@SemiSlides I mean the stuff you present is amazing, reverse search allows me to find nearby topics as well. Of course there will be something's you will miss given the length you can give to each topic , I want to go into more detail. I mean these are constraints you have with a TH-cam video.
I have also noticed that a lot of ur work in this video comes from principles of lithography haha, would appreciate if you add references in the future videos.
Would you introduce a series of topics about dry etching? I work in a semiconductor manufacturing company. I can’t wait to discuss this with you!
Thank you for your comment and for being such an awesome Silicon Pioneer! 🙌 Dry etching is an incredible topic, and I can already see your passion for it shining through! Right now, we’re fully immersed in CMP-think of it as polishing not just wafers but our knowledge, one layer at a time. 😄 You’re absolutely right that sharing knowledge helps deepen understanding-your expertise in dry etching could light up this community! Imagine the insights we could spark together. 🔥 Why not kick things off by sharing some of your experiences? Discussions like these often lead to "Eureka!" moments (like finding the perfect etch selectivity). While we haven’t decided on our next topic yet, rest assured it’ll be something that feels as neatly organized as a bookshelf in a cleanroom. Until then, your suggestions and enthusiasm keep us inspired. Let’s keep the conversation flowing! 🚀
Thank you for the amazing video. Can you give reference for the detailed equations if someone is looking to dive deeper ?
Thank you for the kind words and for joining the Silicon Pioneers! 🙌 The short answer is, unfortunately, no. Here’s why: our channel focuses on the industry side of semiconductor technology, where the goal is less about theoretical modeling and more about sensing and controlling materials, equipment, and processes to consistently achieve high-quality production. While equations are vital for understanding the principles behind phenomena, in the industry, they often take a back seat to practical challenges like process stability and yield improvement. That said, if you’re looking to dive deeper into the theoretical side, tools like Google Scholar, university thesis, or even simulation software documentation are fantastic places to start. I’d likely turn to those same resources myself since I don’t keep any secret stash of equations in my back pocket (though I wish I did)! 😄 Keep asking great questions and exploring-your curiosity is what makes you a true Silicon Pioneer. 🚀
that's great!
I never approve of using AI to voice videos. Ever, I hate them. But this whole series of deep dives is worth the grating voice(s). No one on this platform has gone this in depth without a chalkboard and a lecture room full of students.
Another great one!
Good video. thank you.
Very helpful video, thanks for uploading!
Вы самые-самые лучшие! ❤ Я никак не ожидал, что вы углубитесь в дальнейшие объяснения! Это действительно самое лучшее обобщение существующих знаний о процессе CMP)
Aguardo novos upload sobre o processo de litografia e suas fases de desenvolvimento. Muito grato 😀
Muito bom sua explicaçao do passo a passo estou me aprimorando para cada dia saber mais sobre esta tecnologia e manter me atualizado Obrigado
very good, thx. but the ai voice is pretty bad
Extraordinary. I learned a lot from your vid. Thank you.
your lectures are the best on youtube❤
Love these lectures!!! Keep them coming!!!!
謝謝!
This is next level of nerdness, always wanted to know what does MGP stands for, now thanks to your channel, i know! Is there a real person behind the channel, it does sounds like AI narration.
God damn, the internet is insane. Great content man, thank you!
May I ask where you got this? I am not offensive
Everything is based on publicly available information. It's just that storytelling has been added. For those who want to know more, I have tried to leave as many references as possible, so please refer to them.
Потрясающе) Спасибо! Приятно смотреть такие видео)
Вау! Классно. Приятно видеть новые видео) CMP - сила!)
Oh my god this is awesome! Why does this have so few views!?!
Oh my god, I expected so. Views might be low, but silicon’s got that glow- Like wafers we’re stacking, soon they’ll be cracking! Thanks for being a Silicon Pioneer, you know!
Hi I would like to thank you for being able to join tsmc as an intern! I was a mere math major student. However since I found your EUV series I started to be strongly attracted to semiconductor industry. Drived by curiosity, I learned semiconductor from scratch while watching your series, and finally get accepted as an intern. I truly appreciate your detailed work, and hope for more series😊
Congrats on landing the TSMC internship! 🎉 It’s incredible to hear how our deep dives-not scratch-level stuff, but the kind of knowledge even field engineers wrestle with-helped you stand out. Your curiosity and dedication truly paid off. Keep pushing forward-we’ve got more advanced content coming your way! 😉
great video
OMG you came back!! Happy to see another video up!
Actually, I never left! Life just had me running a full production line. 😉 But it’s awesome to be back and reconnect with you all! Let’s keep the Silicon revolution going, Pioneer!
Wonderful resources!!!!
These are such great resources❤️❤️❤️ thank you!
Hi, nice to meet you. I really like your video. i learned a lot from you. actually i have a friend who has something not understand about this video, so she want to understand more from the powerpoint and translate to her own language to understand better. is that possible for you to offer me the powerpoint please? thank you very much. looking forward to your response. have a good day.
Hi there! Nice to meet you too! Thanks for the kind words-I'm thrilled you enjoyed the video and found it helpful. 😊 As much as I'd love to help, PowerPoint is like a stubborn old computer-it doesn’t support language translation. But here's the good news: TH-cam has some nifty features! It offers transcripts and translation options that might be just what your friend needs. Feel free to drop any questions here, and I'll be more than happy to dive deep into them or point you toward some great resources. Have a fantastic day, and happy learning to both you and your friend! 🚀✨
How do you think when gaafet will get high k/ metal gate instead SiO2
Great question! Actually, GAAFETs, just like their older siblings Planar Transistors and FinFETs, are already using High-k/Metal Gate (HKMG) technology instead of SiO2. The HKMG club is quite inclusive, you see! If SiO2 were still being used, it would feel like inviting a typewriter to a laptop convention. Thanks for watching, and keep those silicon inquiries coming! 😊🔬
Very informative video, got cleared lots of doubts. Thanks alot.
Not against any Indian batter
Looks like our silicon wafers could give even the toughest Indian batters a run for their money! Just as resilient and ready to handle any fastball... or rather, fast electron. 🏏🔬
Thanks for making this content. It is great and can't be better than this.
Oh man I could use a camel ride right now. Not an AI voiced camel ride.
Oh, a classic camel ride does sound fun! But these days, AI voices are smoother and more comfortable than any bumpy camel ride. We're living in a time where distinguishing between human and AI voices is tough, so don't miss out on the perks of new technology! 😉🚀
This is what i wanted for long time. Thank you so much
I have an interview with TSMC tomorrow, and I study here :) Thanks a lot...
That's fantastic news! I hope the interview went well. How did it turn out? We're all curious to know if you dazzled TSMC with your semiconductor savvy! Keep us posted, Silicon Pioneer! 🌟🚀
@@SemiSlides actually, it was pretty good and maybe you won't believe that but I got the job!
That's fantastic news! 🎉 Congrats on landing the job at TSMC! It’s amazing to hear that the content was helpful for your interview prep. I always strive to pack in as many useful tips and insights as possible, drawing from my own experiences as a job interviewer and those of others in the field. It’s awesome to know that it paid off for you. Welcome to the semiconductor world, Silicon Pioneer! 🚀 Keep pushing the boundaries of innovation! 🌟
congratulations!!!, what did you study and what languaje did you learn, also how did you get an interview. Its quite early for me i believe because im a student but i want to prepare a lot to get there.
@@rojasgonzales8210 Thank you so much! I have studied photolithography in detail through TH-cam channels and academic papers. However, I had the opportunity to conduct hands on experiments on photolithography during my PhD at the University of New Mexico :) Still, I applied many jobs that are close to my skills. After getting accepted, I started to study Chinese :) I believe you are a successful student and for preparation I can say that "the earlier the better"...
Thanks for the amazing video. I am wondering if ASML Orion system can use other company’s alignment mark design? E.g can 2000i use Intel’s own alignment mark? Thanks.
Thank you for the great feedback and for watching the video! Regarding your question about the ASML Orion system and the use of Intel's alignment marks, that's a great query. However, our channel doesn't disclose any information that could infringe on a company's confidential details or trade secrets. In general, ASML systems are designed to be quite versatile, but specific implementations involving proprietary designs like Intel's alignment marks would fall into the category of confidential information. Thanks for understanding, and keep exploring the fascinating world of semiconductors! 😊
@@SemiSlides also curious what is the difference between alignment mark and overlay mark? in terms of functionality
Hey there, Silicon Pioneer! Great question! Let's dive into the differences between alignment marks and overlay marks from a functionality perspective, especially in the context of ASML Twinscan systems. Alignment Marks: These are used to align the reticle (the photomask) with the wafer. Given that photolithography equipment is expensive, maintaining continuous operation on the exposure side is the top priority. Therefore, the alignment measurement on the measure side must be completed in less time than it takes for the exposure side to process a single wafer. This means the system can't align every single field on the wafer individually. Instead, it focuses on aligning the entire wafer with the entire reticle to keep things running smoothly and efficiently. Overlay Marks: These come into play after the exposure and, unlike alignment marks, the process doesn't affect the expensive ASML system's productivity. As a result, a separate overlay measurement system can be used to thoroughly and massively measure the overlay for each individual exposure field. This helps identify any misalignment across all the exposure fields and provides detailed feedback to ensure better alignment for future exposures. And hey, apologies for the delay in getting back to you. Sometimes, the notification system likes to take its sweet time. Thanks for your patience! Keep those awesome questions coming! Cheers, Semi Sherpa 🌟
I'm here just to say that this is at moment the best channel that i found on youtube about the litography theme 👏👏👏 Already subscribe and waiting for the new videos, despite the fact i'll never own a multi-million lithography machine, it's amazing to see how these things works! Thanks and keep going with the channel 😉👍
Thank you so much for your kind words! We're thrilled to hear that you find our channel to be the best on TH-cam for lithography themes. Your support means a lot to us. And don't worry, we'll keep this secret about our channel being the best from Professor Chris Mack over at the Litho Guru channel! We're currently working on content about CMP, but we'd love to know if there are specific aspects of lithography you're interested in learning more about. Thanks again for subscribing and for your enthusiasm. Stay tuned for more amazing content!
@@SemiSlidesHaha, I think Mr. Mack deserves to know how good he is at explaining this things! Tell him about my comment 😂. And about your question: There are a lot of videos around this theme here on YT, but all the contents are just "the same"... your channel goes deep on the "technical thing", and this is what makes you different from the others. Keep going on this way, the internet is already full of generic information, but your content is rich! Thank you for sharing your experience with us 🙏.
very informative, thank you
I wonder what kind of properties a synthetic diamond mirror would give.
Thanks for the intriguing question! Here’s my take: 1. Low EUV Reflectivity: Single-layer diamond films don't offer high reflectivity for EUV wavelengths. Effective EUV mirrors require multilayer coatings, like Mo/Si Bragg mirrors. 2. Material Comparison: Diamond doesn’t provide significant advantages over Mo/Si multilayers. At EUV wavelengths, diamond and graphite offer similar atomic properties, making their unique bonding structures less impactful. 3. Manufacturing Challenges: Diamond substrates are difficult to process with techniques like ion milling, limiting their practical application. 4. Hydrogen Environment Issue: In EUV systems, hydrogen environments used to manage tin debris can cause diamond to convert to hydrocarbons, further complicating its use. I appreciate the great question. For a broader perspective, consider discussing this on a forum with a larger audience. Keep those brilliant questions coming, Silicon Pioneer!
Thank you for much valuable and systematical introduction
Thank you so much for your generous $10 Super Thanks! We truly appreciate your support. Regarding the content on masks, it’s based on real-world semiconductor production practices. We incorporate insights from experts with over 20 years of experience in the field, ensuring that our information is both accurate and highly relevant. Your engagement and support help us continue to share this valuable knowledge.
謝謝!
Total 13.4nm comprises 40 bi-layer + 1 capping layer. Each bi-layer 6.9nm?
Regarding the thickness of the Mo/Si mirror, please refer to EUVL Part 3. th-cam.com/video/Sx41pOBUu1I/w-d-xo.html
Thanks ,,,,,wow