DIY Photolithography using 1980s Carl Zeiss S-Planar Lens (405nm)

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  • เผยแพร่เมื่อ 25 ธ.ค. 2024

ความคิดเห็น • 114

  • @delphicdescant
    @delphicdescant 5 ปีที่แล้ว +128

    There are far too few DIY photolithography resources on the internet. Thank you for taking such bold steps on this front.

  • @Grak70
    @Grak70 3 ปีที่แล้ว +40

    As a professional lithographer, this is damn impressive. Well done!

  • @ChristopherofEngland
    @ChristopherofEngland 5 วันที่ผ่านมา

    Imo whoever engineered this process is a genius

  • @VlatkoGalic
    @VlatkoGalic 3 หลายเดือนก่อน +2

    This is the best content internet-wise... thanks mate

  • @craigking391
    @craigking391 2 ปีที่แล้ว +5

    I have a collection of old 100mm test Si wafers that also have the multi colored effect. The photo resist is somewhere around 40 to 100 nm thickness. They were exposed with EUV light where I used to work in Berkeley. I'm quite impressed by your ability to get results this good in a home lab setup. Nicely done.

  • @DanielRowe
    @DanielRowe 4 ปีที่แล้ว +8

    Wow that optical effect looks impressive.

  • @denizaliylmaz9263
    @denizaliylmaz9263 3 ปีที่แล้ว +60

    "Screw it! I'm doing my own computer."

    • @GermanTopGameTV
      @GermanTopGameTV 3 ปีที่แล้ว +19

      Chip shortage? Allright, I'll do it myself then.

    • @kevin-jm3qb
      @kevin-jm3qb 3 ปีที่แล้ว

      Lmao

    • @caiocc12
      @caiocc12 3 ปีที่แล้ว

      You kid but in the next years I guarantee someone will do it in their garage

    • @LL-01
      @LL-01 3 ปีที่แล้ว +1

      @@caiocc12 someone already have, forgot the name but he does have a semiconcunductor fab lab in his garage, rather awesome to see someone make chips without umbelivably clean rooms.

    • @Drozerix
      @Drozerix 2 ปีที่แล้ว +1

      @@LL-01 makes me wonder if clean rooms are only needed to get consistently good batches needed in a mass production type environment. Obviously dust and other particles will interfere, but if some once can get away without a clean room then it certainly suggests something.

  • @weedmanwestvancouverbc9266
    @weedmanwestvancouverbc9266 3 ปีที่แล้ว +5

    As a side note, silicon wafers are annealed with an intense light source called a Vortek lamp.
    In a fused silica tube, water is pumped one way, argon gas the other and a strong AC current is passed through.

  • @Alexander_Sannikov
    @Alexander_Sannikov 3 ปีที่แล้ว +1

    i'm doing a hobby project on computational wave optics and your series is very useful for me to get into the right mood

  • @Kargoneth
    @Kargoneth 9 หลายเดือนก่อน +2

    Structural colouration. Like bird feathers and buttfly wings. Nice results.

  • @patnutoris4054
    @patnutoris4054 3 ปีที่แล้ว +18

    Nice video.
    Just a small recommendation. You could also bake the substrate at 115-120C before the photo-resist coating to drive out any possible water on the surface of the substrate, this improves adhesion. If possible, also apply a chemical called HMDS to further improve the adhesion of photo-resist. This small steps tend to improve the resolution somewhat.

    • @craigking391
      @craigking391 2 ปีที่แล้ว +1

      Yes, a prebake is good for resists that are sensitive to moisture in the air. A 2 minute bake and on to a copper plate for 10 seconds then coat immediately. Usually gets me a good quality coating.

  • @extradimension7356
    @extradimension7356 5 ปีที่แล้ว +2

    Very cool unexpected result with the discrete color effects, and the way they overlay. Funny too dropping the sample "Jam side down" , there is a lot of good physics and statistics as to why that's almost an universal law.

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว

      You are referring to Murphy I assume...

    • @extradimension7356
      @extradimension7356 5 ปีที่แล้ว +1

      @@HuygensOptics Actually I did this with my young son at the time to flip toast off a counter top as part of a school science project. So the idea is you nudge the toast jam side up horizontally off the kitchen counter (simulate the normal kitchen blunder"), and generally as the toast slips over the edge a partial rotation is introduced, given the standard height of a counter top, 1G and the time taken to make half a rotation tends to be a very good fit for said toast to land jam side down. We did tests with higher counter tops and even from the top of the fridge to see if we could introduce a full rotation so it would land Jam side UP. I believe a University in the U.K. also did similar tests (Southampton or Exeter, can't remember ) did some very rigorous work on that also. There is some substantial research and statistics on this (now). I wonder how often stuff gets dropped at Intel lol.

  • @causeitso
    @causeitso 3 ปีที่แล้ว +6

    The color effect I think is due to the same reason some butterfly wing is blue. Micro structures reflect selectively, but the interesting thing is that this butterfly wing is blue even with different view angles so it's not just plain diffraction. This should be interesting if you could produce colors using micro structures with your setup.
    Great video.

  • @yoppindia
    @yoppindia 4 ปีที่แล้ว +11

    genius, i have some hope of making my own chip dream come true.

  • @martonlerant5672
    @martonlerant5672 3 ปีที่แล้ว +1

    This channel is likely to become far more viewed and subbed.
    Keep up the good work!

  • @emanuelnowak5809
    @emanuelnowak5809 5 ปีที่แล้ว +18

    Applied Science have serious competition! thanks for interesting video, subbed and wait for more ;)

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว +10

      Thanks for the huge compliment. Actualy I'm a big fan of the Applied Science channel and feel that it would be impossible for me to ever match what Ben Krasnow has achieved. There will be another photolithography video, but it will take me quite some more time to complete.

    • @markkrutzmann6862
      @markkrutzmann6862 3 ปีที่แล้ว +3

      @@HuygensOptics I think you are achieving even more here, as you actually go in the depths of making your solution a more permanent fixture than Ben does. He only shows a proof of concept mostly, but credit where it is due, he goes into many many projects.
      You both are highly appreciated though, and I like watching both channels.

    • @AnkushGirotra
      @AnkushGirotra 3 ปีที่แล้ว

      Love both channels. Huge demand for more content like this!

  • @chaudry123
    @chaudry123 2 ปีที่แล้ว +1

    Really love and appreciate your work especially the curiosity

  • @impooser
    @impooser 3 ปีที่แล้ว +1

    Wow!!! You did all by yourself! Great respect.

  • @WhatAWondWorld
    @WhatAWondWorld 3 ปีที่แล้ว +1

    incredible

  • @ViceChief
    @ViceChief 5 ปีที่แล้ว +6

    You're doing great work and these videos are really fantastic. Thank you.

  • @arkanjo7509
    @arkanjo7509 2 ปีที่แล้ว +1

    thank you so much.
    no way to thank you.
    very good video and great quality.

  • @TalkingBook
    @TalkingBook 5 ปีที่แล้ว +7

    Loved loved loved this!

  • @warp188
    @warp188 3 ปีที่แล้ว +1

    Thanks for the content, my dream is to one day have open source tools for fotolitography

  • @MrAndersonHimself
    @MrAndersonHimself ปีที่แล้ว +1

    This is incredible!

  • @theastroslav
    @theastroslav 3 ปีที่แล้ว +6

    Great stuff! For the pattern, I wonder if you can instead place just the elements of a 4K LCD and draw patterns on your computer to be used. I’m assuming the polarization would cause issues to the focusing?

    • @HuygensOptics
      @HuygensOptics  3 ปีที่แล้ว +4

      th-cam.com/video/_w0Z2Y5vaAQ/w-d-xo.html
      You can also use the lcd of a 3d printer.

  • @glasslinger
    @glasslinger 3 ปีที่แล้ว +4

    Looks good! I think I will try to make a pentium chip!

    • @Drozerix
      @Drozerix 2 ปีที่แล้ว

      It has been a life dream of mine to make a pentium chip. If you can make a 32-bit chip you are golden in my eyes. I'm very excited about learning this sort of complex stuff.

  • @Grateful.For.Everything
    @Grateful.For.Everything ปีที่แล้ว +1

    The image at 8:01 is wild, how is that even a thing lol, I'm a bit elevated currently and my mind is not comprehending this pattern but I am really intrigued now, who figured all that out, what is that, ahhhhh so many questions lol, sorry but I do really wanna know now.

  • @Allan_aka_RocKITEman
    @Allan_aka_RocKITEman 2 ปีที่แล้ว +1

    *Great work!*

  • @Антонаа-л9в
    @Антонаа-л9в 2 ปีที่แล้ว +1

    Could you please answer what the type of microscope did you use?

  • @douro20
    @douro20 4 ปีที่แล้ว +2

    Fujifilm owns what used to be Olin's photochemical business.

  • @hanselda
    @hanselda 3 ปีที่แล้ว +1

    That is interesting. The first lithographic optics from Zeiss was indeed based on Planar.

  • @MrSchubiduuu
    @MrSchubiduuu 3 ปีที่แล้ว

    Ist's so amazing top see what I should be able to do after university. Thank you so much for this!

    • @HuygensOptics
      @HuygensOptics  3 ปีที่แล้ว +1

      You don't have to wait untill you finish university...

  • @Ryzler13
    @Ryzler13 3 ปีที่แล้ว +2

    OH DIY, sure, next video we show how to make a DIY hadron collider.

  • @mubafaw
    @mubafaw ปีที่แล้ว

    Great explanation. Thank you Thank you Thank you!!!!!

  • @ShopperPlug
    @ShopperPlug 3 ปีที่แล้ว +1

    How do you make the photomask? can this be used on a vertical CNC bed and sensitize photoresist of PCBs with resolution of 1 micron?

  • @HAWXLEADER
    @HAWXLEADER 3 ปีที่แล้ว +1

    What do you mean by the maximum resolution of the lens? how can a lens have resolution?
    Is this due to lens imperfections in the polishing process?

    • @hexane360
      @hexane360 3 ปีที่แล้ว

      Watch the previous video in the series. He's referring to diffraction limited resolution.

  • @ShihWeiChieh
    @ShihWeiChieh ปีที่แล้ว

    hi Huygens, i am trying to cure wet photoresist film with 405nm laser, however i never get a clear develop image. Is it because of the scattered light?

  • @julkiewitz
    @julkiewitz 2 ปีที่แล้ว +1

    Maybe a stupid question, but wouldn't the layer of photo resist be slightly thicker at the center of the spinning disk as the centrifugal forces are higher towards the edges?

    • @HuygensOptics
      @HuygensOptics  2 ปีที่แล้ว

      It's a very good question and actually I do not know a good answer to this. It is far from trivial why the film would end up uniformly, especially on large wafers that are used in chip manufacture. I guess it is all about the right combination of solvent (so the evaporation rate), the solid content, viscosity and spinning speed.

  • @Axelito4201
    @Axelito4201 ปีที่แล้ว

    How did you do the masks?

  • @joshuatanase3718
    @joshuatanase3718 3 ปีที่แล้ว +1

    Very nice. Does the lens avoid barrel distortion or is it present?

    • @HuygensOptics
      @HuygensOptics  3 ปีที่แล้ว +1

      It's minimized as much as possible.

  • @madisonhanberry6019
    @madisonhanberry6019 ปีที่แล้ว +1

    "I accidentally dropped the sample on the floor" 😂
    Pretty great result, all things considered

  • @davizord01
    @davizord01 5 ปีที่แล้ว +1

    Thanks for the explanation!!!

  • @juancarlosdominguezsolis.4665
    @juancarlosdominguezsolis.4665 4 ปีที่แล้ว +1

    Thanks for do this vídeo but what Is the chemical name of fotoresistor?

    • @HuygensOptics
      @HuygensOptics  4 ปีที่แล้ว

      The resist is of the dnq type: www.google.com/url?sa=t&source=web&rct=j&url=en.m.wikipedia.org/wiki/Photoresist&ved=2ahUKEwiCh4OTj-_pAhVE4aQKHVGyDhoQFjABegQICBAB&usg=AOvVaw2s2opYilYTx00tImmKTdh1

  • @АивлдЧовт
    @АивлдЧовт ปีที่แล้ว

    Super !

  • @niteman555
    @niteman555 5 ปีที่แล้ว +1

    Those color patterns seem to be the result of regular, non-even lithography due to variations in feature shape caused by edge effects. The uneven etching would cause interference patterns in the reflected visible light, and the color regularity would be caused by similar features having similar interference patterns. What do you think?

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว

      Very good suggestion. Yes, I think it could be this kind of effect. As was mentioned in the video I think it is the thickness variations in the resist causing the effect. It can be either refraction, or an interference effect, for example between the glass/resist interface and the resist/air interface.

    • @extradimension7356
      @extradimension7356 5 ปีที่แล้ว

      @@HuygensOptics Can you use your set up to replicate miniature holographic plates ?

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว +1

      No I don't think so , due to the 1:5 demagnification optimization for the lens. So making 1:1 copies is actually not feasible with the resolution required for holography.

    • @extradimension7356
      @extradimension7356 5 ปีที่แล้ว

      @@HuygensOptics Ahhh I see what you mean, the diffraction pattern is locked to the wavelength(s) of light in the original holographic plate and hence reducing that by a factor 5, (If that was possible) would create a diffraction pattern (theoretically) that is not even in the visible spectrum. So you would need a synthetically generated holographic diffraction pattern (to start off with) that would be 5x the size to create a smaller holographic plate? [Which I guess would be pointless maybe?].
      As an aside I've been wondering about aliasing artifacts (sampling theory) with the lens you are using is there are any useful effects or accidental byproducts from your rig (as well as the colors) ? I'll keep watching with interest and anticipation.

  • @richardspectacular5327
    @richardspectacular5327 3 ปีที่แล้ว

    Not bad, but can you hack a CRT to do e-beam lithography?

  • @honigbrai
    @honigbrai 2 ปีที่แล้ว

    Nice project! Which photo resist did you use?

  • @AFAMINE
    @AFAMINE 3 ปีที่แล้ว

    Nice work and well explanation , which photoresist did you use ? And where did you buy it ? Thanks

  • @hypoallergeni
    @hypoallergeni 5 ปีที่แล้ว +1

    What kind of photoresist did you use?

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว +1

      The photoresist I used was Olin 00835 from Ciba Geigy. It was a sample given to me so I don't have any details. I also could not find any info on the Internet.

  • @teresashinkansen9402
    @teresashinkansen9402 ปีที่แล้ว

    Im attempting something similar with microscope objectives, however I am having a hard time achieving good focus, I tried to use another objective to focus the projected image but the thickness of the slide is too much and gives unusable images due spherical aberration.

    • @HuygensOptics
      @HuygensOptics  ปีที่แล้ว

      Correct, most microscope objectives require a 0.17mm cover slip to get to the diffraction limit. Also, you need a tube lens in case your objective is infinity corrected. I will actually be discussing this in the upcoming video when measuring the wavefront errors in various optics.

  • @martincastellano89
    @martincastellano89 7 หลายเดือนก่อน

    do you have a video on how to do the mask?

    • @HuygensOptics
      @HuygensOptics  7 หลายเดือนก่อน +1

      No but if you search for e-beam lithography photomask manufacture you will definitely find something.

  • @RandomerFellow
    @RandomerFellow 10 หลายเดือนก่อน

    That lens is not easy to get hold of...
    Can others be used? If the quality requirements are slightly lower?

  • @juancarlosdominguezsolis.4665
    @juancarlosdominguezsolis.4665 4 ปีที่แล้ว

    Thanks for making this video but I am doing something similar but with other material but I cannot find any image of any processor or integrated to do the photolithography, do you know where to find one?

    • @HuygensOptics
      @HuygensOptics  4 ปีที่แล้ว +2

      At zeptobars.com you can find a lot of IC designs. However finding masks for the individual layers is hard since this is proprietary information. I see that currently photomasks of Cray computer chips being sold on ebay. But you need a full set to make anything useful.

  • @rock3tcatU233
    @rock3tcatU233 4 ปีที่แล้ว

    ASML should watch out for some new competition here. :)
    That's a nice setup you got there, but with regards to the spin coater; How did you manage to keep the sample perfectly centered and now cause it to vibrate itself loose?

    • @HuygensOptics
      @HuygensOptics  4 ปีที่แล้ว

      The double side tape I use is actually way too strong by itself, so I have to decrease the sticking quite a lot before I can use it. The samples are small and so are the centrifugal forces. There is no need to center exactly.

  • @ARVash
    @ARVash 3 ปีที่แล้ว

    It would be cool to see how much text you could fit on a small piece of glass say 2.5cm, and then if it were possible to read it with the naked eye using reflection or something

    • @ARVash
      @ARVash 3 ปีที่แล้ว

      Have you ever seen that effect where when you hold something very close to your eye if you allow the eye to defocus you can see microscopic features in the reflection, that's what I'm thinking

  • @weirdsciencetv4999
    @weirdsciencetv4999 8 หลายเดือนก่อน

    Where did you order the photoresist?

    • @HuygensOptics
      @HuygensOptics  8 หลายเดือนก่อน

      With MicroChemicals in Germany

    • @weirdsciencetv4999
      @weirdsciencetv4999 8 หลายเดือนก่อน

      @@HuygensOptics thank you! I will see if I can get some for my students

  • @tiagotiagot
    @tiagotiagot 3 ปีที่แล้ว +1

    Will be cool if you can figure out how to control the colors and make some images with structural color; or perhaps even holograms! :D

  • @woolfoma
    @woolfoma 3 ปีที่แล้ว

    This is sick- how did you even get your hands on that lens?

    • @HuygensOptics
      @HuygensOptics  3 ปีที่แล้ว

      ebay, just search for Zeiss S-planar.

  • @nicktohzyu
    @nicktohzyu 3 ปีที่แล้ว

    why such a large distance between the mask and lens?

    • @pizzablender
      @pizzablender 3 ปีที่แล้ว

      The lens needs that, it has a long focal length.

  • @plastodoido
    @plastodoido 5 ปีที่แล้ว

    Amazing!!

  • @fzigunov
    @fzigunov 4 ปีที่แล้ว +9

    It's not DIY if you don't drop it on the floor!!

  • @intexclouds9607
    @intexclouds9607 5 ปีที่แล้ว

    Can you please tell me about the light source?? What is the make??...is it 4-5 nm UV??
    Thanks in advance.

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว +2

      I'm not sure about the make, but I bought the LEDs on Ebay for only a few dollars from China. If you search on Ebay for "405nm LED" you will find many hits, some even have a power rating of 50 to100W. Quality is quite variable but generally they work (maybe not at the specified rating) and prices are pretty low. Best regards, Jeroen

    • @intexclouds9607
      @intexclouds9607 5 ปีที่แล้ว

      @@HuygensOptics thank you for the reply, Sir... I mis-heard you saying 4 or 5 nm....so I was surprised, as it would come under extreme UV and its very difficult to even achieve such low wavelength.... Thank you once again for clarifying.

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว

      Ah ok, sorry for my bad pronunciation. EUV is 13 nm and as you mentioned it is extremely difficult to make. If only EUV LEDs were available. That would make the people at ASML very happy... ;-).

    • @intexclouds9607
      @intexclouds9607 5 ปีที่แล้ว

      @@HuygensOptics 😄 true that.... thank you for the reply, Sir.

  • @extradimension7356
    @extradimension7356 5 ปีที่แล้ว +1

    I think it would be very interesting to shoot a Siemens star as an input image (mask) and then see the photoresist and etch of the 5:1 reduction ratio. Might be another way to visualize various limiting resolutions / MTF and potential aliasing characteristics of the whole system. Wondering if you get chromatic effects there as well ? Not just film thickness or regular diffraction effects / different colors ?

    • @HuygensOptics
      @HuygensOptics  5 ปีที่แล้ว +1

      It is possible to use a Siemens star, but generally it will show the limitations in resolution rather than show color effects. I am currently builing something with which it will be possible to engineer the observed color effects as desired. It will be discussed in an upcoming video, however it will take me quite some time to complete, since it will be my most complex project so far. cheers.

    • @extradimension7356
      @extradimension7356 5 ปีที่แล้ว

      @@HuygensOptics That sounds incredible / superb ! I wonder with thin film interference you can predictively make different colors deliberately ? And Maybe devise methods of measurement. [I know some processes in micro machining one can machine 'rainbows" into a surface or deliberate corresponding colors/ wavelengths by control.]. Depending of fine-ness of features you could even do a color dithered plate of an image ? very intriguing also interested in how your photoresists interact with polarized light ? I think you could have some really cool Fritz Goro type imagery there. Good Luck / sounds cool what ever you are planning to do :-)

    • @Dukey8668
      @Dukey8668 5 ปีที่แล้ว +1

      @@extradimension7356 Lippmann plates are somewhat similar to what you are describing.

    • @extradimension7356
      @extradimension7356 5 ปีที่แล้ว

      @@Dukey8668 Thanks for mentioning that ! , Did not know of their existence. I'm reading about the Lippmann plates right now, (0.01 - 0.04 micron grain size , incredibly small) ~ Amazing interference effect with sandwiched reflective surface to replicate actual colors (from reflection) + "The developed and fixated diffraction patterns constitute a Bragg condition …" Lippmann won a Nobel prize for that in 1908 (apparently) , Interesting that they can't be replicated (has security applications) , would love to see one in person, (Wonder if people still make Lippmann plates today ? ). Seems a bit like good Daguerreotypes, hard to replicate on a computer screen but truly amazing to view in real life.

    • @Dukey8668
      @Dukey8668 5 ปีที่แล้ว

      @@extradimension7356 There are still a few people making Lippmanns, mainly in this facebook group: facebook.com/groups/1422495841341822/
      I'm no fan of facebook and you need to ask to join the group, but this is probably the best collection of Lippmanns on the internet.

  • @ramjetross
    @ramjetross 3 ปีที่แล้ว +1

    Why not use a 405nm laser? You have some chromatic aberration with the LED. I suppose you'll have polarization and interference issues but that could be solved and averaged out by vibrating the laser slightly. Alternatively, you could use a band pass filter to narrow the LED spectrum or if your optics in the beam path sharply absorb below 405nm, like some of mine do, then you could use a short pass filter around 410nm to get a band pass effect.
    I'm also wondering how hard it was to focus the image onto the diffuser glass. Did you essentially have to level all for corners precisely in focus to get the whole pattern?
    Over all, awesome video and good methods.

    • @HuygensOptics
      @HuygensOptics  3 ปีที่แล้ว +4

      I tried using a 405nm laser and it gave quite a lot of speckles in the image. I guess, as you said, slightly vibrating the laser could solve that. But more importantly, it is not easy to blow up the laser beam to a size where it would illuminate the full surface of the condensing mirror. especially not if the laser is so close to the mirror surface. As for focussing: I set the diffuser as accurately perpendicular to the optical axis of the lens, then tweaked the angles of the mask a bit in order to get the image sharp in all corners in the image. Tweaking the mask is easier since it is 5 times less sensitive to movement, due to the demagnification.

    • @Grak70
      @Grak70 3 ปีที่แล้ว +2

      Lasers have too much spatial coherence to use for DIY lithography. In industry excimer lasers, they add special optics to decouple spatial and temporal coherence.

  • @sugar-alisportstv
    @sugar-alisportstv ปีที่แล้ว

    How do one 100% know that a resistor, inductor, capacitor, transistor, mosfet, and gate, or gate, or exclusive or gate has been etched to produce an actual working circuit?

  • @ONRIPRESENCE
    @ONRIPRESENCE 2 ปีที่แล้ว

    4:41 oops

  • @montesumma4737
    @montesumma4737 3 ปีที่แล้ว

    you can make cotton candy with this thing

  • @ikeetkreeft1973
    @ikeetkreeft1973 ปีที่แล้ว

    4:40 made me laugh

  • @johnarizona3820
    @johnarizona3820 3 ปีที่แล้ว

    ^5

  • @mab7727
    @mab7727 ปีที่แล้ว

    Please, What light source did you exactly use?