the DLP features are square dots so if you align your features to the DLP grid you should get better results for lines and blocks, diagonals are always going to be bad. ps. amazing work
Not yet. I'm a bit worried the photoresist layer won't hold up to the echants. We'll see though! I did do the same test an a piece of copper pcb board and etched it with ferric chloride and it held up.
Good to know this can be used for PCBs as well. I make small, one off, prototype PCBs quite often, but struggle with the masking and exposure. The black areas on the transparencies from my laser printer always allow a very small amount of light through which makes the exposure time quite finicky. Sometimes I'm left with an invisible (very thin) layer of photoresist on the copper and it blocks the acid from etching properly. I see projectors like this for sale locally quite often, so I might give this a go. Your videos are awesome. Keep up the incredible work.
@glyn hodges Yes, but in the case of PCB or (very) basic IC manufacturing, just sticking the OLED display on the photoresist shouldn't be too much of an issue, I think?
@glyn hodges all your points are of course excellent, but there might still be hope: I just learned that the currently smallest OLED pixel is just 6.3um across, so even with a bit of a diffuser, 10um features might still be possible. OTOH, a projected UV source would actually be more versatile. Ah well.
I wonder if you could eliminate distortions from all the projector optics by illuminating the DLP chip directly with a laser and shining the reflected beam onto the wafer. I suspect interference patterns would be a problem - maybe vibrate it to avarage these out ? I have no idea if this would work, just seems from my limited optics knowledge like it may be worth trying
+mikeselectricstuff that's very interesting. I could at least use a more collimated light source or add a polarizer filter. That may help a bit. I'm thinking about getting a DLP development board and making my own exposure/stepped from scratch so I may play with your laser idea.
Can tell you from experience that DLP chips and lasers don't mix. you just end up with diffraction mess. I think Laser DLP projectors use phosphors to get around it.
Ill give you 100 bucks to make me a GPU! This is absolutely awesome. In high school we learned about logic and built virtual CPUs, I can't imagine doing what you're doing. So many things need to be understood to even do the basics. I love it!
@@SamZeloof I was able to take the color wheel and attach it externally on my DLP projector (inside an enclosure, but still wired) so that the projector wouldn't complain about a missing color wheel signal. When I want to use it as a projector again I just move the color wheel back in place.
Hi. I've found that white LED lights with a filter of Kapton tape works really well for UV photo emulsions. The polyimide structure filters UV and blue violet effectively.
Your work is mind-bogglingly amazing. It's like you're the child of Jeri Ellsworth and Ben Krasnow ;) But the video production could do with a bit of help (your camera's auto-focus really does need a good talking to) I haven't even got around to etching my own PCBs yet... and you're doing this!! Wow! Keep up The Great Work.
Awesome channel! I've been working on a vacuum chamber myself, got a little turbo pump for it. Got all the fittings.... only missing the chamber. Hoping to get enough space to begin making / messing about.
Whenever I've done any kind of lithography, I've used an LED headlamp. There are many you can get right on Amazon for cheap that have red LEDs on them. You can see really well, and don't have to worry about walking around in complete darkness.
sam: have you tried starting the spin coater BEFORE you start applying ? Spin it around 500 rpm while applying, then ramp up. you will get much more even coat :)
This is very cool man. For your manual Pre align you can use a stage setup and that would be a lot better for better overlay results. For the shutter you can probably make a old camera shutter work.
Impressive results, and kudos for showing your work! Really inspiring. But thiere is one really important physics fact that needs to be taken in to account here, but it isn't mentioned. And that is the simple fact that the wavelenght of the light used plays an important role here! Particularly if you are expecting to go down in size/detail from where you are now. The wavelenght of visible light is roughly 400 to 700 nm. And to get any features even close to that means you need really good optics. And you need to use a narow specter to get better focus. So there is a very important reason UV light is used. It's shorter wavelength, and thus able to be focused on smaller details. So a purple laser as your lightsource would possibly be a good idea. Or a UV source, if the optics are capable of it. So, you won't be able to go up in resolution just by using a lens that is downscaling the size of your image with your current setup, like you talk about. Just the same as no optical microscopes have a higher magnification higher than say 1000 to 1250. It's physically not possible to image details smaller than that due to the wavelength of visible light.
Not only is the wavelength of light important, but the linewidth as well. An ArF laser exhibits linewidths of 0.05nm. In terms of optics, durability is more important than their optical properties. The power of these pulsed lasers is so high that it destroys CaF vacuum windows. It looks like a small orange feather has embedded into the window. Cleaning up the beam with a spatial filter and focusing it are the easy parts. Except for the fact that the wafer is flat, but the image plane is not.
this process of wavelength being "too fat" for smaller parts can be possibly overcome by using another frequency of light that is reflected (thus carries away the energy the photons that are injecting energy, where the other frequency is bombarding the area as well) to restrict the effect of the particles that are on that wave's outer sides only allowing the ones that strike when in the narrower confines needed to react the compounds, though this is where I diverge from using photo resists, to using materials and energtic wavelengths that allow direct decomposition of materials onto the surface like laying down copper oxide nano particles and then lazing them to break the oxygen off leaving a ton of energy in the copper particles so that they fuse together to make a solid copper trace, then removal of all unreacted powder to allow adding other materials to those layers before moving on to the next layer. That in a nutshell is the basis of my development of a 3D printer that allows for both 3D printing things like this channel's owner is producing, as well as deconstructing them in a way that allows sucking up the materials through a system that separates them and stores them for later use, and while it will be slow when printing say a CPU or some specific IC, ram, as well as the boards themselves with the resolution dictating the speed of print, it still should be in the realm of feasibility for a home user to use my 3D printer when done, at home in the office to print out say a cell phone from scratch, and use it with in a few days, rather than the expected response of it taking more than a lifetime to print out one item. (switching between that process and using a multi holed extruder for printing plastic cases that take hours now, instead in minutes, is one example)
@@aion2177 not as much as I would like, seems life keeps throwing chores at me that have to be dealt with, and the pandemic is just another one, (mainly because I see this as a learning excersis before the real test comes, like say a deadly virus like ebola mutating to where it spreads as easily as common cold, incubates long enough for the person to spread it and then kills 50 to 80% of those infected so instead of millions dying because of infection of billions, it will be more like over 2 billion people being infected world wide and 1 billion or more being dead, regardless of how good their health was. so we need proactive measures to protect us all the time, even when no virus is known to exist like UV germicidal systems that provide air curtains to blow anything from one person heading for the other person on the other side of the curtain, down away from their faces and suck it up in vents at the bottom to run it past the UV lamp and sterilize it, before pumping the air out and down from over head to again keep forcing any biological matter in our sneezes and coughs down away from all our faces, so I have been working on a modular system that every store, business and even homes can have installed where this might be needed, and the only inconvenience is light things like paper money you have to hold onto while passing it through the air curtain, so it does not blow away, until the other person has a firm hold on it, *and using lots of paper weights to keep papers from blowing around LOL.) I have a design to start working on too soon that is diode laser based for its filtration, as it is powerful enough to melt enough rosin core solder (60/40 Pb tin mix) almost instantly to make a 3/16th inch diameter bead of solder, and vaporizes the rosin in it so well that there is no smell, and zero greasy residue left over, and will run it for about an hour and 20 minutes off of a single 2500mAh Li-ion 18650 so it should make a wearable rechargeable air filtration unit possible, until we have better UV LEDs in the higher spectrum, (something else I need to get to work on for my replicator level 3D printer tooling, for the head, as I think I have a good concept that will allow open faced LEDs that the chip is protected in a little trick from outside contaminating atmosphere with out having anything in front, directly of the path of the beam, so even x-ray frequency photons can be emitted to get super tiny LOL. Best part is the research and development of stuff for the 3D printer tech and air sterilizing tech cross over quite well, so I should soon have some videos up of various developments.
@@ThomasAndersonbsf hmm not sure i understood everything you been sayin' .. seems like you want to use laser diode of some stronger intensity to melt some solder .. which does what exactly? Mind you any Pb use which gets into your body is extremely toxic. Please be very careful with that. Did not understood that part of what you are up to. But one thing which might work, is use laser to kill any microbes in the air... if that is what you are saying.. then how do you solve the issue of how to hit all the space with the laser ray? .. i've seen horizontal lasers .. and if that is bounced in a resonant cavity.. like back and forth between mirrors .. then it can hit the entire space.. but problem i think is.. is still not powerful enough if is a horizontal beam.. the point laser is strong enough.. but getting it into all of the space.. is super hard.... because is like filling 3d space with a line... sorry you need an infinite line bouncing at angles of infinite small degree .. and even if in practice would work since the ray has indeed some thickness.. is still gonna be problematic filling the space properly to create a full filtration zone... i did worked on some ventilator design for covid.. but now i decided to build my shop and focus on what i can control.. and once there i can properly go on with the ventilator design ...
I've always felt pretty confused and irrelevant, when thought of how many transistors could be placed in a microchip by the producers throughout recent half of century. It was just unimaginable. However, thanks to you and videos like this one, I can now "agree" with the technology and say "ok that's, basically, possible and that's the way you actually do it.". For some people it's a game changer. Cheers!
Nice, very interesting to use DLP chips / projector. Maybe I could use it to make PCBs (am into electronics) As far as video in the almost dark goes, I have a couple of Sony SuperHAD 'starlight' cameras from ebay, about 30 $ each, those can see if you can see, without IR light source, are about 0.01 lux or something like that, analog video out.
I'd guess that for an even coating you want the wafer more flat against the surface of your spin-coater than that loop of painters tape allows. If you stick a piece of painter's tape to a surface, apply a tiny bit of superglue to the back of it and put another piece of painter's tape on top with the sticky side up, you get a nice flat piece of double sided tape with all the benefits of painter's tape.
I had a similar idea ages ago, for deposition rather than just reacting photo polymer epoxies but with LCD tech and did not discover DLP tech till a year or so after searching unsuccessfully for a decent clear LCD system lol. Now to use multiple color LEDs for interference so you can shrink your size of processing down :)
nice just finished the video and I see now you were thinking LCD as well, I did not even get far enough to see the issues with contrast, honestly, but my main issue with DLP is the fact that it might have to be delidded in a vacuum and maintained in said vacuum or under argon when not being used to allow for higher UV to be used since it will absorb in nearly anything that is used as a gas buffer. or coating over the DLP chips so quartz fused glass units will only be good for some of the UV range, but not VUV (vacuum ultra violet) range, which would be necessary for some de-oxidation tricks I am looking at (this is the range that when it its say a CO2 mol, it breaks the molecule apart to give raw carbon and raw oxygen, like what happens to any CO2 that gets bounced high enough in the upper atmosphere, to be subjected to raw sunlight, with out an atmosphere between it to act as a filter, thus limiting the amount of CO2 that can exist since the sun is constantly destroying a percentage of it, that rises as the sum total percent in the atmosphere rises. :)
Amazing project. The masks for complex designs are expensive, sure, but they do have a lot of masks, and they operate at very high precision with special features. (the top designs can have hundredths of masks, and cost up to million to design, make and tool them; a lot of that is ensuring quality and precision of the blank masks, etc. ). For lower tech nodes, getting few masks for relatively small project isn't super expensive. One can get a set for 10k$-30k$ for relatively process node. Still too expensive for prototyping or hobbists, but withing reach of universities, or when you want to scale production once you tested your prototypes. Once you have masks, making 10000 chips, especially if they are rather small, is definitively a possibility. For 800nm masks are relatively cheap, about 1k$ per mask, and you only need few to make useful products with them. So that is reachable and often many innovative products can still be made this way.
Suggestion: mod your projector with a switch that you can use to disable the light source... It would even be possible to use an Arduino controlled relay for more precise timing. I've been experimenting with this sort of thing for awhile myself and figured a few things out. I hope it helps you. Great content. Not a lot of people are doing this on their own. Fewer are putting it out on TH-cam for others to learn from. If you could at some point discuss the process of refining the silicon it would help me a lot. That's what I'm currently struggling with. I've looked and I found very little on the subject that's any kind of specific as to the finer points of the process.
That sounds to be like a damned if you, damned if you don't scenario. My first thought would be to write a simple app that instead of displaying a static image, displays black, then the app right on the computer can deal with the timing, but I'm wondering how black it actually gets. I'm sure there is some leakage. But now that I'm typing this, he IS relying on the black pixels being black enough for this to work, so maybe that would be a good option. On the other hand, those bulbs take a while to warm up and get to prime operation. I would be a little concerned with turning the lamp on/off directly when it comes to timing. I can't see how that could deliver consistent results.
Forgive me the question: It is your private laboratory at home? Well I like your movies, and I would like to play as you are doing but I dont know how I could afford purchase such sophisticated equipment.
Alignment will be challenging, but you can just make two targets which you align. I would work out some kind of motor bed on linear bearings fed by servo motor, see NeoCnc. Then on that you would have pesio electric 2 axis bed which you can find and are reasonable in price. Then write some software to detect the targets and auto align. Then you can use a whole wafer and step through making many copies.
Also you had mentioned possibly using a microscope. I noticed radical microscopes ranging from 400 - 800 usd. They seem to have a lot of room to work with, plus usb camera, as well as another reticle which you could probably focus a image into. Maybe even first illuminate image with infrared whilst using usb camera, for alignment.
Don't know how exactly you will dope the two trenches in the cmos to give their semiconducting characteristics? That seems to be missing part as well as laying down copper? But you could work out the cmos gates with a few experimental tests to get a good gate design, then make a whole array of them. Then insulating layer with via's and do copper traces on top to connect all the gates and implement the logic.
Enjoying this series. You remind me of myself at your age. By the way, at 12:16, you say "hydrophobic" and I think you mean "hydrophillic" so the liquid photoresist will stick.
Awesome work. Will a higher resolution DLP result in a higher resolution coating? Also now I'm wondering about the limitations of the optics, potentially the projected light could be lensed further - aberration might be able to be removed in software, so long as it's a constant.
He's in the micron range not the nanometer range. But. Clever arrangements is how industry made nanometer scaled transistors, basically with visible or near visible light you need micron sized exposures, so there are microns between the nanometer sized gates. That method also happens to produce very sloppy gates. Industrially today however they don't use visible light or near visible they use higher energy reflected and focused radiation with lenses that literally dissolve in water. Pretty fascinating but I don't like it for home use. University of Utah has some great papers about using stamps to make the masks with feature sizes down to the nanometer scale, that makes more sense for home DIY, since you can do things like using multiple exposures to build up the negative mold for the stamp allowing the averages between exposures to clean up the messy gate from the visible light method.
sem, sim (scanning electron/ion microscopy) plasma vacuum deposition piezo-cd print with multiple heads, multi-material, and electron scan, x-ray material detection of samples, all in one cd-rom sized manufacturing with two heads
perhaps this is not thought trough, but could the spinning distribution of, in this case photoresist, be dependant on having the chip centre in the exact centre of the spinning chuck? also perhaps the initial drop of liquid being in centre.
That is possible. The initial drops quickly flatten out and cover most of the surface so I don't think that would be a factor but if the wafer is off-center on the chuck that could definitely cause problems.
this is like a recursive rabbit holes of details. anyway one commercial spinners sported a "spirit guide to ensure even coverage" (ossila). so keeping the wafers level seems to matter, perhaps the tape mounting could be causing the substrate to tilt when spinning? right, i have never done anything even remotely like this, so im just guessing here :)
That's very possible. I'm in the process of building a proper spin coater with a vacuum chuck and using one of these for a rotary union www.deublin.com/products/rotating-unions/idev/passages_one-passages/
hint: you can do WAY better than a DLP projector - just use a traditional enlarger or copy stand. Get a piece of lith film made of appropriate resolution (or DIY with film) and then project onto your wafers using a DIY pin registration device
Why not use a UV laser with a set of galvanometers? A couple of front surface mirrors could be assembled such that large movements are converted into small movements.
I bet that stick figure speech bubble has some profanity in it and that is why you suddenly cut off the microscope footage when the bubble came into view! XD Just to satisfy my curiosity... what does the text in that speech bubble say?
hate to say i think you have it backwards - any portion of the layer that is exposed to light becomes INSOLUBLE to water - that's how photography and lithography work.
Playing with DLP is silly for sub nanometer ranges... You'll get much better practical results using a simple polygon UV laser scanner for a 10um feature size, there's commercial products that brings it down to 8um and open source projects to 10um... similar concept with the x-ray thing. Also you haven't given any valid information of important aspects, such as what kind DLP projector is being used and lens specification... this doesn't seem like a "scientific" controlled experiment in mind. You can even go down to "nm range" of photolithography (around 300nm or so) using simple dirt cheap "Blu-Ray" optic drive units which read/writes data into the Blu-Ray discs using 405nm lasers. Since blu-ray technology read/writes data in the sub nanometer range. The only thing I found helpful of this video was that anything lower than 7nm photolithography causes "quantum tunneling"... LOL But I have to give some respect for your effort, haven't seen other people going into great depths for precision. Edit: I guess you realized DLP is for kids lmfaoo I see you're playing with the electron beam...
@@oscargr_ Alright not in the "Sub" nanometer range but in the "Sub" micron range. Here is proof that Blu-Ray reads/writes at the "Nanometer" range: i2.wp.com/azuradisc.com/wp-content/uploads/2019/01/1200px-Comparison_CD_DVD_HDDVD_BD.svg.png?fit=1200%2C600&ssl=1
the DLP features are square dots so if you align your features to the DLP grid you should get better results for lines and blocks, diagonals are always going to be bad.
ps. amazing work
Sweet! Have you tried an etching process with this new technique?
Not yet. I'm a bit worried the photoresist layer won't hold up to the echants. We'll see though!
I did do the same test an a piece of copper pcb board and etched it with ferric chloride and it held up.
Good to know this can be used for PCBs as well. I make small, one off, prototype PCBs quite often, but struggle with the masking and exposure. The black areas on the transparencies from my laser printer always allow a very small amount of light through which makes the exposure time quite finicky. Sometimes I'm left with an invisible (very thin) layer of photoresist on the copper and it blocks the acid from etching properly. I see projectors like this for sale locally quite often, so I might give this a go.
Your videos are awesome. Keep up the incredible work.
Just wondering: Couldn't one simply lay an OLED screen from a cell phone on top of the photoresist? The blacks should be 100% black
@glyn hodges Yes, but in the case of PCB or (very) basic IC manufacturing, just sticking the OLED display on the photoresist shouldn't be too much of an issue, I think?
@glyn hodges all your points are of course excellent, but there might still be hope: I just learned that the currently smallest OLED pixel is just 6.3um across, so even with a bit of a diffuser, 10um features might still be possible.
OTOH, a projected UV source would actually be more versatile. Ah well.
I wonder if you could eliminate distortions from all the projector optics by illuminating the DLP chip directly with a laser and shining the reflected beam onto the wafer. I suspect interference patterns would be a problem - maybe vibrate it to avarage these out ? I have no idea if this would work, just seems from my limited optics knowledge like it may be worth trying
+mikeselectricstuff that's very interesting. I could at least use a more collimated light source or add a polarizer filter. That may help a bit. I'm thinking about getting a DLP development board and making my own exposure/stepped from scratch so I may play with your laser idea.
Can tell you from experience that DLP chips and lasers don't mix. you just end up with diffraction mess. I think Laser DLP projectors use phosphors to get around it.
mainly just replace the projection lens which introduce the distortion. Get or make a custom lens that is somewhat flat on both sides.
Ill give you 100 bucks to make me a GPU!
This is absolutely awesome. In high school we learned about logic and built virtual CPUs, I can't imagine doing what you're doing. So many things need to be understood to even do the basics. I love it!
You could probably get more light out of the projector by removing the colour wheel
+mikeselectricstuff almost definitely. I haven't had much time to mess with this but I'll probably end up getting a newer projector too.
@@SamZeloof I was able to take the color wheel and attach it externally on my DLP projector (inside an enclosure, but still wired) so that the projector wouldn't complain about a missing color wheel signal. When I want to use it as a projector again I just move the color wheel back in place.
Hi. I've found that white LED lights with a filter of Kapton tape works really well for UV photo emulsions. The polyimide structure filters UV and blue violet effectively.
This is the kind of awesome content I come to TH-cam for. Can't believe this has so little exposure
Your work is mind-bogglingly amazing. It's like you're the child of Jeri Ellsworth and Ben Krasnow ;) But the video production could do with a bit of help (your camera's auto-focus really does need a good talking to)
I haven't even got around to etching my own PCBs yet... and you're doing this!! Wow! Keep up The Great Work.
Awesome channel! I've been working on a vacuum chamber myself, got a little turbo pump for it. Got all the fittings.... only missing the chamber. Hoping to get enough space to begin making / messing about.
thanks, good luck! high vacuum stuff is a lot of fun.
This is great! But i wonnder can we use photoresist that made for PCB making.
This is amazing! One thing I noticed is that It looks like the optics on your DLP might have a little bit of astigmatism.
+hpux735 yes, it does. That dlp is from 1999, I will be getting a new one soon.
"The rate of people claiming that Moore's law will die doubles every two years"
Whenever I've done any kind of lithography, I've used an LED headlamp. There are many you can get right on Amazon for cheap that have red LEDs on them. You can see really well, and don't have to worry about walking around in complete darkness.
Awesome idea. Would be nice to see some etching. Can we then do MEMS?
sam: have you tried starting the spin coater BEFORE you start applying ? Spin it around 500 rpm while applying, then ramp up. you will get much more even coat :)
Man I used that exact projector as a TV for years. That thing was a beast. It was still going when I gave it away a d probably still is.
This is very cool man. For your manual Pre align you can use a stage setup and that would be a lot better for better overlay results. For the shutter you can probably make a old camera shutter work.
Impressive results, and kudos for showing your work! Really inspiring.
But thiere is one really important physics fact that needs to be taken in to account here, but it isn't mentioned. And that is the simple fact that the wavelenght of the light used plays an important role here! Particularly if you are expecting to go down in size/detail from where you are now. The wavelenght of visible light is roughly 400 to 700 nm. And to get any features even close to that means you need really good optics. And you need to use a narow specter to get better focus. So there is a very important reason UV light is used. It's shorter wavelength, and thus able to be focused on smaller details. So a purple laser as your lightsource would possibly be a good idea. Or a UV source, if the optics are capable of it.
So, you won't be able to go up in resolution just by using a lens that is downscaling the size of your image with your current setup, like you talk about.
Just the same as no optical microscopes have a higher magnification higher than say 1000 to 1250. It's physically not possible to image details smaller than that due to the wavelength of visible light.
Not only is the wavelength of light important, but the linewidth as well. An ArF laser exhibits linewidths of 0.05nm.
In terms of optics, durability is more important than their optical properties. The power of these pulsed lasers is so high that it destroys CaF vacuum windows. It looks like a small orange feather has embedded into the window.
Cleaning up the beam with a spatial filter and focusing it are the easy parts. Except for the fact that the wafer is flat, but the image plane is not.
this process of wavelength being "too fat" for smaller parts can be possibly overcome by using another frequency of light that is reflected (thus carries away the energy the photons that are injecting energy, where the other frequency is bombarding the area as well) to restrict the effect of the particles that are on that wave's outer sides only allowing the ones that strike when in the narrower confines needed to react the compounds, though this is where I diverge from using photo resists, to using materials and energtic wavelengths that allow direct decomposition of materials onto the surface like laying down copper oxide nano particles and then lazing them to break the oxygen off leaving a ton of energy in the copper particles so that they fuse together to make a solid copper trace, then removal of all unreacted powder to allow adding other materials to those layers before moving on to the next layer. That in a nutshell is the basis of my development of a 3D printer that allows for both 3D printing things like this channel's owner is producing, as well as deconstructing them in a way that allows sucking up the materials through a system that separates them and stores them for later use, and while it will be slow when printing say a CPU or some specific IC, ram, as well as the boards themselves with the resolution dictating the speed of print, it still should be in the realm of feasibility for a home user to use my 3D printer when done, at home in the office to print out say a cell phone from scratch, and use it with in a few days, rather than the expected response of it taking more than a lifetime to print out one item. (switching between that process and using a multi holed extruder for printing plastic cases that take hours now, instead in minutes, is one example)
@@ThomasAndersonbsf that sounds rely interesting. did you had any progress with your method?
@@aion2177 not as much as I would like, seems life keeps throwing chores at me that have to be dealt with, and the pandemic is just another one, (mainly because I see this as a learning excersis before the real test comes, like say a deadly virus like ebola mutating to where it spreads as easily as common cold, incubates long enough for the person to spread it and then kills 50 to 80% of those infected so instead of millions dying because of infection of billions, it will be more like over 2 billion people being infected world wide and 1 billion or more being dead, regardless of how good their health was.
so we need proactive measures to protect us all the time, even when no virus is known to exist like UV germicidal systems that provide air curtains to blow anything from one person heading for the other person on the other side of the curtain, down away from their faces and suck it up in vents at the bottom to run it past the UV lamp and sterilize it, before pumping the air out and down from over head to again keep forcing any biological matter in our sneezes and coughs down away from all our faces, so I have been working on a modular system that every store, business and even homes can have installed where this might be needed, and the only inconvenience is light things like paper money you have to hold onto while passing it through the air curtain, so it does not blow away, until the other person has a firm hold on it, *and using lots of paper weights to keep papers from blowing around LOL.) I have a design to start working on too soon that is diode laser based for its filtration, as it is powerful enough to melt enough rosin core solder (60/40 Pb tin mix) almost instantly to make a 3/16th inch diameter bead of solder, and vaporizes the rosin in it so well that there is no smell, and zero greasy residue left over, and will run it for about an hour and 20 minutes off of a single 2500mAh Li-ion 18650 so it should make a wearable rechargeable air filtration unit possible, until we have better UV LEDs in the higher spectrum, (something else I need to get to work on for my replicator level 3D printer tooling, for the head, as I think I have a good concept that will allow open faced LEDs that the chip is protected in a little trick from outside contaminating atmosphere with out having anything in front, directly of the path of the beam, so even x-ray frequency photons can be emitted to get super tiny LOL.
Best part is the research and development of stuff for the 3D printer tech and air sterilizing tech cross over quite well, so I should soon have some videos up of various developments.
@@ThomasAndersonbsf hmm not sure i understood everything you been sayin' .. seems like you want to use laser diode of some stronger intensity to melt some solder .. which does what exactly? Mind you any Pb use which gets into your body is extremely toxic. Please be very careful with that. Did not understood that part of what you are up to.
But one thing which might work, is use laser to kill any microbes in the air... if that is what you are saying.. then how do you solve the issue of how to hit all the space with the laser ray? .. i've seen horizontal lasers .. and if that is bounced in a resonant cavity.. like back and forth between mirrors .. then it can hit the entire space.. but problem i think is.. is still not powerful enough if is a horizontal beam.. the point laser is strong enough.. but getting it into all of the space.. is super hard.... because is like filling 3d space with a line... sorry you need an infinite line bouncing at angles of infinite small degree .. and even if in practice would work since the ray has indeed some thickness.. is still gonna be problematic filling the space properly to create a full filtration zone... i did worked on some ventilator design for covid.. but now i decided to build my shop and focus on what i can control.. and once there i can properly go on with the ventilator design ...
I've always felt pretty confused and irrelevant, when thought of how many transistors could be placed in a microchip by the producers throughout recent half of century. It was just unimaginable. However, thanks to you and videos like this one, I can now "agree" with the technology and say "ok that's, basically, possible and that's the way you actually do it.". For some people it's a game changer. Cheers!
This is awesome! I'm curious as to what brand/model lens you used on the front of the projector. Just trying to get an idea of what to look for.
Nice, very interesting to use DLP chips / projector.
Maybe I could use it to make PCBs (am into electronics)
As far as video in the almost dark goes, I have a couple of Sony SuperHAD 'starlight' cameras from ebay,
about 30 $ each, those can see if you can see, without IR light source, are about 0.01 lux or something like that,
analog video out.
I'd guess that for an even coating you want the wafer more flat against the surface of your spin-coater than that loop of painters tape allows.
If you stick a piece of painter's tape to a surface, apply a tiny bit of superglue to the back of it and put another piece of painter's tape on top with the sticky side up, you get a nice flat piece of double sided tape with all the benefits of painter's tape.
Very interesting. Seems like the gamma is wrong for this application, and some preprocessing to make the greys more linear would help.
I had a similar idea ages ago, for deposition rather than just reacting photo polymer epoxies but with LCD tech and did not discover DLP tech till a year or so after searching unsuccessfully for a decent clear LCD system lol.
Now to use multiple color LEDs for interference so you can shrink your size of processing down :)
nice just finished the video and I see now you were thinking LCD as well, I did not even get far enough to see the issues with contrast, honestly, but my main issue with DLP is the fact that it might have to be delidded in a vacuum and maintained in said vacuum or under argon when not being used to allow for higher UV to be used since it will absorb in nearly anything that is used as a gas buffer. or coating over the DLP chips so quartz fused glass units will only be good for some of the UV range, but not VUV (vacuum ultra violet) range, which would be necessary for some de-oxidation tricks I am looking at (this is the range that when it its say a CO2 mol, it breaks the molecule apart to give raw carbon and raw oxygen, like what happens to any CO2 that gets bounced high enough in the upper atmosphere, to be subjected to raw sunlight, with out an atmosphere between it to act as a filter, thus limiting the amount of CO2 that can exist since the sun is constantly destroying a percentage of it, that rises as the sum total percent in the atmosphere rises. :)
It looks like vibration is playing a part in the lack of a clean sharp image... Just a guess
Amazing project. The masks for complex designs are expensive, sure, but they do have a lot of masks, and they operate at very high precision with special features. (the top designs can have hundredths of masks, and cost up to million to design, make and tool them; a lot of that is ensuring quality and precision of the blank masks, etc. ). For lower tech nodes, getting few masks for relatively small project isn't super expensive. One can get a set for 10k$-30k$ for relatively process node. Still too expensive for prototyping or hobbists, but withing reach of universities, or when you want to scale production once you tested your prototypes. Once you have masks, making 10000 chips, especially if they are rather small, is definitively a possibility. For 800nm masks are relatively cheap, about 1k$ per mask, and you only need few to make useful products with them. So that is reachable and often many innovative products can still be made this way.
Suggestion: mod your projector with a switch that you can use to disable the light source... It would even be possible to use an Arduino controlled relay for more precise timing. I've been experimenting with this sort of thing for awhile myself and figured a few things out. I hope it helps you.
Great content. Not a lot of people are doing this on their own. Fewer are putting it out on TH-cam for others to learn from. If you could at some point discuss the process of refining the silicon it would help me a lot. That's what I'm currently struggling with. I've looked and I found very little on the subject that's any kind of specific as to the finer points of the process.
That sounds to be like a damned if you, damned if you don't scenario. My first thought would be to write a simple app that instead of displaying a static image, displays black, then the app right on the computer can deal with the timing, but I'm wondering how black it actually gets. I'm sure there is some leakage. But now that I'm typing this, he IS relying on the black pixels being black enough for this to work, so maybe that would be a good option.
On the other hand, those bulbs take a while to warm up and get to prime operation. I would be a little concerned with turning the lamp on/off directly when it comes to timing. I can't see how that could deliver consistent results.
Great work..... i want to know how those photomask are made......
Forgive me the question: It is your private laboratory at home? Well I like your movies, and I would like to play as you are doing but I dont know how I could afford purchase such sophisticated equipment.
OnMyWay .
That's really awesome. Now you have to construct a whole cmos about 10 um wide. Then make basic cpu out of it just to say you did.
That's the plan... thanks :)
Alignment will be challenging, but you can just make two targets which you align. I would work out some kind of motor bed on linear bearings fed by servo motor, see NeoCnc. Then on that you would have pesio electric 2 axis bed which you can find and are reasonable in price. Then write some software to detect the targets and auto align. Then you can use a whole wafer and step through making many copies.
awesome idea, i'll definitely add that to the list
Also you had mentioned possibly using a microscope. I noticed radical microscopes ranging from 400 - 800 usd. They seem to have a lot of room to work with, plus usb camera, as well as another reticle which you could probably focus a image into. Maybe even first illuminate image with infrared whilst using usb camera, for alignment.
Don't know how exactly you will dope the two trenches in the cmos to give their semiconducting characteristics? That seems to be missing part as well as laying down copper? But you could work out the cmos gates with a few experimental tests to get a good gate design, then make a whole array of them. Then insulating layer with via's and do copper traces on top to connect all the gates and implement the logic.
Enjoying this series. You remind me of myself at your age.
By the way, at 12:16, you say "hydrophobic" and I think you mean "hydrophillic" so the liquid photoresist will stick.
Thanks. Actually, with the resist its a little counterintuitive and you want it hydrophobic.Everything else wants hydrophillic though.
Awesome work. Will a higher resolution DLP result in a higher resolution coating? Also now I'm wondering about the limitations of the optics, potentially the projected light could be lensed further - aberration might be able to be removed in software, so long as it's a constant.
Also diffraction limitation
Could you use a low-pressure sodium lamp as a safelight while depositing the resist and before developing it?
Where can I acquire some positive photoresist to give this a shot myself?
Nice, very nice. I have to try this. 18 microns seems good enough for me. I would definitely enjoy being able to make a 100nm ranged line width
Sam, would it be possible to manufacture a diffraction grating using maskless photolithography? Thanks!
this is amazing! chip making finally goes digital
Wow, that's some impressive results!
How do you shine the projection through a microscope lens to go to the nanometer scale?
Have you have been successful in doing so?
He's in the micron range not the nanometer range.
But. Clever arrangements is how industry made nanometer scaled transistors, basically with visible or near visible light you need micron sized exposures, so there are microns between the nanometer sized gates. That method also happens to produce very sloppy gates.
Industrially today however they don't use visible light or near visible they use higher energy reflected and focused radiation with lenses that literally dissolve in water. Pretty fascinating but I don't like it for home use.
University of Utah has some great papers about using stamps to make the masks with feature sizes down to the nanometer scale, that makes more sense for home DIY, since you can do things like using multiple exposures to build up the negative mold for the stamp allowing the averages between exposures to clean up the messy gate from the visible light method.
I bet you can get higher precision with a DVD burner laser mounted on a CNC or 3d printer-esque assembly. Cheers!
What kind of lens would one look for?
sem, sim (scanning electron/ion microscopy) plasma vacuum deposition piezo-cd print with multiple heads, multi-material, and electron scan, x-ray material detection of samples, all in one cd-rom sized manufacturing with two heads
should easily 3d-print, draw, nanometer linewidth parts incrementally
Thanks for the compliment on my attention span. Also for the interesting video.
How did you aquire this microscope? It looks really fancy.
No problem haha. It is quite fancy. I got it from a retired scientist friend...
Neat! I usually borrow my dads when I need one. But I can't figure out a way to make decent images through the binocular.
I use one of these www.amazon.com/AmScope-CA-NIK-SLR-Camera-Adapter-Microscopes/dp/B005OZ4BME/ref=sr_1_1?ie=UTF8&qid=1488059893&sr=8-1&keywords=
Very impressive! Great results.
i'd LOVE to try it at home, but i'm scared $#!+less of HF 😅
perhaps this is not thought trough, but could the spinning distribution of, in this case photoresist, be dependant on having the chip centre in the exact centre of the spinning chuck? also perhaps the initial drop of liquid being in centre.
That is possible. The initial drops quickly flatten out and cover most of the surface so I don't think that would be a factor but if the wafer is off-center on the chuck that could definitely cause problems.
this is like a recursive rabbit holes of details. anyway one commercial spinners sported a "spirit guide to ensure even coverage" (ossila).
so keeping the wafers level seems to matter, perhaps the tape mounting could be causing the substrate to tilt when spinning?
right, i have never done anything even remotely like this, so im just guessing here :)
That's very possible. I'm in the process of building a proper spin coater with a vacuum chuck and using one of these for a rotary union www.deublin.com/products/rotating-unions/idev/passages_one-passages/
Where to get the silicon?
hi can you make a polariser filter with this thechnology ?
Zeloof Semicon!!!
for the yellow light take a piece of wide kaptan tape and cover your lamp with it.
Nice. Watch the light reflection. The table and stand for the projector are serious light pollution
where do you buy AZ4210 photoresist?
well done.well well done.Respect!👏👏👏👏
We are at 2nm transistor sizes now 🙏
great video!
Do you know a good textbook to read?
hint: you can do WAY better than a DLP projector - just use a traditional enlarger or copy stand. Get a piece of lith film made of appropriate resolution (or DIY with film) and then project onto your wafers using a DIY pin registration device
Can you go into more detail on this?
Where can i get the photoresist?
amazing idea keep going
wOW :d You give me Hope man ! wow
Nice video, thanks :)
Fantastique
Why not use a UV laser with a set of galvanometers?
A couple of front surface mirrors could be assembled such that large movements are converted into small movements.
pure genious
凄い
I bet that stick figure speech bubble has some profanity in it and that is why you suddenly cut off the microscope footage when the bubble came into view! XD Just to satisfy my curiosity... what does the text in that speech bubble say?
Rgb mouse attempts to foil litho process. Not today.
i come from the future... thanks for watching?? no! thanks for sharing!
*Transistor below 7nm can Quantum tunnel and doesn't work*
Meanwhile amd in 2021 with 4nm : we don't do that here
4y later we have 5nm chip....😉
wow son, your lo seems specticle. Hmm
23:05
hate to say i think you have it backwards - any portion of the layer that is exposed to light becomes INSOLUBLE to water - that's how photography and lithography work.
please tell me what the second type is called so i may look for it then .... never heard of this.
Build a chipfab with DLPs an I can order my own chips.
Beats intel 10um in his basement xD
Playing with DLP is silly for sub nanometer ranges...
You'll get much better practical results using a simple polygon UV laser scanner for a 10um feature size, there's commercial products that brings it down to 8um and open source projects to 10um... similar concept with the x-ray thing. Also you haven't given any valid information of important aspects, such as what kind DLP projector is being used and lens specification... this doesn't seem like a "scientific" controlled experiment in mind.
You can even go down to "nm range" of photolithography (around 300nm or so) using simple dirt cheap "Blu-Ray" optic drive units which read/writes data into the Blu-Ray discs using 405nm lasers. Since blu-ray technology read/writes data in the sub nanometer range.
The only thing I found helpful of this video was that anything lower than 7nm photolithography causes "quantum tunneling"... LOL
But I have to give some respect for your effort, haven't seen other people going into great depths for precision.
Edit: I guess you realized DLP is for kids lmfaoo I see you're playing with the electron beam...
Nope, Blue ray does not read/write at the sub nanometre range.
@@oscargr_ Alright not in the "Sub" nanometer range but in the "Sub" micron range. Here is proof that Blu-Ray reads/writes at the "Nanometer" range:
i2.wp.com/azuradisc.com/wp-content/uploads/2019/01/1200px-Comparison_CD_DVD_HDDVD_BD.svg.png?fit=1200%2C600&ssl=1
@@sto2779 LoL
CD is in the sub micron range.