Carl Zeiss S-planar lens pt.1: general discussion
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- เผยแพร่เมื่อ 29 ส.ค. 2024
- This is my first video on a Carl Zeiss wafer stepper lens which was produced in the 1980s and used for photolithography at 405 nm (mercury lamp h-line). In this video I will discuss the history and some general properties of this lens like the large chromatic aberration.
Some images in the video were reproduced from www.marcocavina..., which is a great source of information on many different Carl Zeiss lenses. Please visit!
I removed the part discussing the Censor indication from the video, since it contained faulty information. I had corrected this error here in the comments but very few people ever read this, so it was better to remove it completely from the video altogether.
Examples of photolithography process video's:
• Nanofabrication Techni...
• Photolithography: Step...
• Manufacturing in the Fab
Video on ASML older wafer stepper technology:
• PAS 5500 - The Inside ...
Hi. I worked for GCA from 1981 until it was shut down in 93 sometime. I worked in product support and developed stepper software. I spent a lot of time in Fabs throughout the world installing features and troubleshooting. David W Mann developed precision lead screws, built optical comparators among other devices.They then turned that technology into a photo repeater, then pattern generator (3600) to print masks, which turned into the first wafer stepper, the DSW 4800. That lens if I remember was 10x reduction lens. I think our spec at the time was 1.25 micron resolution, when the industry was at 2 micron, if my memory is correct! Your video rings back a lot of memories!
This is an awesome video. Love the demonstration of chromatic aberration / different corresponding focal planes for each wavelength with the tablet (genius) @10:00 . Thermal expansion IS a big deal for precision optical systems, funny / cool clarification of the "Censor". So very very very true that you don't know how someone may have taken something apart, monkeyed about withit , reassembled things wrong, lose original factory calibration and of course drop the damn thing ! This is a problem for precision photogrammetric cameras and imaging systems also particularly dropping the camera/ instrument and need for factory recalibration. @Huygens Optics THANKS for making this video I'm hooked ! Really high quality useful stuff you are putting out there. Big Time !
Thanks for the huge compliments! I'll do my best to post some more video's on optics in the future
I have seen plenty of chromatic aberration, and I have always felt like I understood how it is caused by the lens and light relationship. but this video really helped my understanding of what is happening.
When the IC production systems using this lens were in operation, a physicist friend explained to me why the minimum spacing of IC die elements could never be much smaller than one micron. Of course he was correct at the time. None of us appreciated what billions of dollars of technology development could achieve or how quickly that would happen. Now I'm less certain about limits even though some must surely be reached eventually.
Thanks a lot for this. Very very useful discussion and tons of new things to learn.
Highly appreciate your effort in making this priceless clip and enjoyed it immensely.
I have to say I really love your videos! You do an excellent job in demystifying optical devices and processes!
Very good video, very good explained and presented. Kind regards from Germany!
What a pleasure to watch your videos, sir.
So much useful information about optics in your videos, also for an average user of ordinary photographic equipment like me. Zeiss apparently also used the designation “S-Planar” for a few lenses made for macro photography. (I have the 135mm f/5.6 S-Planar in Hasselblad mount but there was also a 100mm f/4 in Contax/Yashica mount. Both have strongly protruding rear elements and can only be used on the respective SLR cameras with extension tubes or bellows). It is curious that the company would use the same name for highly specialised, industrial lenses and for consumer photography lenses.
I discover your channel a few day ago and it's really awsome and very interesting , thanks for taking the time to share your knowleges and experience in thant field . Thanks you very much !!!
Amazing video. Liked and subscribed.
why did they use a lens instead of a curved mirror?
Lenses are much more compact. Size is an issue in wafer stepper/scanner machines. The most cutting edge technology uses mirrors because there are no glasses that won't absorb the wavelength of light that is used.
So tell me, could you actually start producing working 6502's or something along those lines in your basement?
Hi Sir,
Can u suggest where i can get this s-planar lens (1:5) as the lens i am getting is of magnification 1:1.6 ?
Best Wishes
Bharat
Can Carl S-Planar Lens 1:1.6 F=25mm 546nm lens be used to do maskless photolithography of silicon ?
Yes but the demagnification is only 1.6 so the resolution would only be this factor smaller than the size of the DMD-mirrors.
@@HuygensOptics hi Thanks for replying. I am planning on usong this lens to etch out 10 micron holes on silicon. I shall be using 1080 resolution dlp projector. Do u think this lens can achieve 15 micron resolution ? I have found that dmd mirrors in this projector is of 7 micron size approx. So according to u I should be able to achieve resolution of 7/1.6 microns ? Am I right ? Is ebay trustworthy in buying such things ?
@@HuygensOptics I don't think that is correct. The 1.6 probably refers to the aperture.
Which came first, the lens (or its predecessors), or the need for the lens? In other words, did to the computer industry go to Carl Zeiss to develop such a lens or was it the other way around? I suppose a similar lens was required for micro-film, and it went on from there.
These lenses were made in the 1980s so they were specifically designed for IC manufacture. Before IC manufacture became a thing, Zeiss already build planar projection type lenses. I actually don't know who contacted who first but I guess the initiative came from the electronics industry in this case.
@@HuygensOptics Thank you for your reply.
@@SubTroppo It was a small team of three engineers at Zeiss who pulled a contract from the electronics industry. Nobody believed in that market and today Zeiss SMT is the most valuable part of the company
wanna sell that lens? i got the 75mm version, but would need a larger image circle
Sorry, I want to hold on to it and probably use it for another project. But if I change my mind, I will contact you. ALso, keep a look out on Ebay, they are regularly offered there.
i was playing with lenses when younger and thought about the focal length/planes being used for burning/etching.
then this comes up LOL, I forgot about photolithography but i would have invented it ahahahha