I've known about this technique for years and thought about why no prototyping companies haven't just made something using it available for small projects, maskless, fast turn-around from design to real things. obviously not good for large volume production, but for prototype silicon, it just seems perfect.
This process is how the masks are made to begin with and it's the reason why they are so expensive. It takes approximately forever to draw out billions of transistors.
That turned out much better than my first attempt at e-beam lithography -- and I was on a tool with commercial EBL hardware! You mention "special" e-beam resists, but what works best in my experience is PMMA. If you get a chance, try that out. Awesome project!
I assume the PMMA crosslinks when exposed, since it is a positive tone resist. Interestingly, I've heard that PMMA can turn into a negative resist when over exposed, though I'm not sure why.
Thanks for posting this! I am working on a planetarium projector with aluminized glass plates for the star masks. I am trying to get pinhole sizes down to 1 micron or finer.
It's so sad to see good equipment get scrapped because it's not the latest and greatest, nice to see someone making good uses of it, and even taking it beyond original capabilities👍
you could omit the beam blanker if you scanned the surface in a Z pattern. Edit: no wait, this is not a laser, you can't turn the beam off that's what the beam blanker is for, nevermind. :)
That acetone developing makes kinda sense, assuming resist you used is phenol based, either light or high heat should cause resist to crosslink and possibly be completely resistant to solvents like acetone. Perhaps if you run beam over wafer twice or so it may give you more leeway for developing time Edit: I commented too early as usual :P what happened there is obviously not what I described.. but interesting nontheless
Very cool! Due to chronic illness I have had to retire from work, and have started to do hobby electronics at home, but damn! You really look like your having fun. Unfortunately for my old line of work, (high energy physics) the building of a particle accelerator in the basement is out of the question, where I live.
You might be surprised what you can find on Ebay. You should make one slowly and upload the videos for us to see. Who knows, the joy you might get from it could give you the strength to fight through your illness.
@@dreggory82 Thank you for your optimism, I will give it a thought, at the moment I am building a Spark Chamber, in the hope of detecting Cosmic Rays (Muons hopefully), so far I am only having luck, electrocuting myself (7.5kV), having to replace Helium that keeps leaking (Expencive and becoming harder to acquire) and detecting alpha particles from the decay of a sample of Americium-2 that I acquired from an older model smoke detector, here's hoping! Should I get the beast to work properly, I will consider making and posting a video. Thanks again for the encouragement.
@@dreggory82 The spark chamber has two plastic scintillation detectors, the Helium-Neon gas mixture is used to ionize, and make the spark path visible, creates a favourable path for the forthcoming spark. I can provide complete schematics and basic theory of design if you wish.
Could you please explain why companies like ASML use ur light instead of electron beams? Electronic microscopes is pretty old technology, and it's known that elections have much shorter wavelengh that any light
Does anyone know if Sam has talked about the overall cost of all tools needed to make chips in his garage? While it does seem possible for the average joe, it still seems extremely expensive to be able to do all of this... The average joe would have to save a lot of money (seemingly...correct me if I'm wrong)
Hardware hackers never buy stuff new. Also, one must understand the overall fundamental process of making said chips. I’m not talking about bleeding edge stuff. Once it’s understood, get the gear that has the possibility of being hacked.
Oh so this is how the masks are made... it is like the chicken egg problem, you would need masks to make the masks, but with this you do not need a mask, but it looks quite slow process
They do actually, but unfortunately all this fun stuff is for the graduate students, and usually you have to specialize in one area. The lab I was in (physics department) made electronic devices and tested them at millikelvin. There was a whole giant new building devoted to nanofab. They had a fancy electron microscope that also had a ion beam that could cut the samples and then scan the new surface. The downside: you had to be certified to use the nanofab, which required $10,000.00 that usually comes from your professors research budget. I tried, I was unable to get my professor's sponsorship.
cool! I'll try this with my antiproton synchrotron beam when I get home.
Where did you get one of those?
@@mrdesmit6038 E-bay
lmfao
Super cool Sam!
Hmmm, Ideas for next project ? ? ?
I've known about this technique for years and thought about why no prototyping companies haven't just made something using it available for small projects, maskless, fast turn-around from design to real things. obviously not good for large volume production, but for prototype silicon, it just seems perfect.
Yeah, it's certainly good for research.
you should hit ASML up with that idea here in the netherlands.
@@km5405 Mapper, a Dutch company developing these kinds of tools, was assimilated into ASML earlier this year
@@TheStormTalon dont you mean ASMiLated?
This process is how the masks are made to begin with and it's the reason why they are so expensive. It takes approximately forever to draw out billions of transistors.
I like the beam essentially being an antenna, an electron whisker.
That turned out much better than my first attempt at e-beam lithography -- and I was on a tool with commercial EBL hardware! You mention "special" e-beam resists, but what works best in my experience is PMMA. If you get a chance, try that out. Awesome project!
does PMMA croslink when exposed to electron beam?
I assume the PMMA crosslinks when exposed, since it is a positive tone resist. Interestingly, I've heard that PMMA can turn into a negative resist when over exposed, though I'm not sure why.
@@unclekyky I work with ebl systems, pmma cross-links with very large doses
These things are extream and deserve 1000000000x attention.
5:38 Nice Irony. Thanks for sharing.
Very cool, Sam. Love the BurrBrown DAC's :-)
The wiring on the back of the microscope is a thing of beauty!
A tiny tile with Nasca figures and a lens would be neat
What is the overall size of the etch?
P.S. This is really cool.
small
Mind blowing. Absolutely fantastic work.
Incredibly impressive man! I can't believe how good of a job you are doing considering how complex lithography can be.
Wow! Good job! Last month, I learned about e-beam in my microfab class.
You are a hero, I have been wanting to do this with my SEM too, but now I'm feeling more confident and inspired.
This is FREAKING AWESOME!
You've earn yourself a subscriber my friend! Really fantastic work you're doing. Can't wait for more!
We need more of this stuff.
Thanks for posting this! I am working on a planetarium projector with aluminized glass plates for the star masks. I am trying to get pinhole sizes down to 1 micron or finer.
Great video, very interesting
Absolutely fantastic !!!
love your channel, great content.
Wow, cool stuff!
My dream have always been to visit a CPU manufacturer laboratory. This is amazing to see.
Really wonderful to see a new video from you :)
+Kent VanderVelden thanks!
I think youtube algorithm is finally picking up this channel
It's so sad to see good equipment get scrapped because it's not the latest and greatest, nice to see someone making good uses of it, and even taking it beyond original capabilities👍
That kind of knowledge you will not find in university
you could omit the beam blanker if you scanned the surface in a Z pattern.
Edit: no wait, this is not a laser, you can't turn the beam off that's what the beam blanker is for, nevermind. :)
Hello sam, nice job. I want to know the time consuming to lithography the pattern in your video.
That acetone developing makes kinda sense, assuming resist you used is phenol based, either light or high heat should cause resist to crosslink and possibly be completely resistant to solvents like acetone. Perhaps if you run beam over wafer twice or so it may give you more leeway for developing time
Edit: I commented too early as usual :P what happened there is obviously not what I described.. but interesting nontheless
rather surprised at the quality of this, lack off dust and impurities even with out a clean room
Really impressive. What is the estimated feature size on this?
Cool channel, but yet underrated. I subscribed.
This is incredible, who the hell are you and how/why did you build this in your garage?
I wouldn’t mind having one of these setups. I’d be making chips.
What line width did it produce?
So nice, where did you get the electron microscope ?
Are you able to use this to make pn junctions?
Sam is like Applied science 2 I like this channel.
wow , iam impressed! cool
I installed the Joe Nabity ebeam system with blanking plates on many SEMs, including a 6400 at UCSD.
Very interesting topic
You can write all great britanica encyclopedia series in a surface smaller than a finger tip. That's impressive.
Very cool! Due to chronic illness I have had to retire from work, and have started to do hobby electronics at home, but damn! You really look like your having fun. Unfortunately for my old line of work, (high energy physics) the building of a particle accelerator in the basement is out of the question, where I live.
You are a physicist?
You might be surprised what you can find on Ebay. You should make one slowly and upload the videos for us to see. Who knows, the joy you might get from it could give you the strength to fight through your illness.
@@dreggory82 Thank you for your optimism, I will give it a thought, at the moment I am building a Spark Chamber, in the hope of detecting Cosmic Rays (Muons hopefully), so far I am only having luck, electrocuting myself (7.5kV), having to replace Helium that keeps leaking (Expencive and becoming harder to acquire) and detecting alpha particles from the decay of a sample of Americium-2 that I acquired from an older model smoke detector, here's hoping! Should I get the beast to work properly, I will consider making and posting a video. Thanks again for the encouragement.
@@kitsouk1 I will subscribe in hopes. What are you using the helium for? Is it the sintillator medium?
@@dreggory82 The spark chamber has two plastic scintillation detectors, the Helium-Neon gas mixture is used to ionize, and make the spark path visible, creates a favourable path for the forthcoming spark. I can provide complete schematics and basic theory of design if you wish.
Small resistor + capacitor to smooth out the transition?
channel is very cool, hope your work is going well
do you know of any open source etch modeling/simulation software?
Thats so cool
Excellent.
So this is why Mapper Lithography went bankrupt...
hey it's like you're at my old work.
Nice friend
So fing cool!
Is all of that your workshop?
Could you please explain why companies like ASML use ur light instead of electron beams? Electronic microscopes is pretty old technology, and it's known that elections have much shorter wavelengh that any light
Hope it has good shielding....... When speeding electrons come to a stop ...YOU Get A lot of radiation ...
Amazing
WRT "beam blanker" - why don't they use gate grid, just like simple triode does ?
how thin is the line your drawing with.
Odd question but Sam how old are you???
Brilliant
It is kinda reminds me how CRT works. But in finer details
Does anyone know if Sam has talked about the overall cost of all tools needed to make chips in his garage? While it does seem possible for the average joe, it still seems extremely expensive to be able to do all of this... The average joe would have to save a lot of money (seemingly...correct me if I'm wrong)
Hardware hackers never buy stuff new. Also, one must understand the overall fundamental process of making said chips. I’m not talking about bleeding edge stuff.
Once it’s understood, get the gear that has the possibility of being hacked.
nice 👌
So do you believe anyone is constructing elements yet in a one atom at a time etch process
Awsome
Won't the e-beam make a bunch of x-rays?
Yeah, they do, AND, it takes even more space, a metal enclosure (to shield you from those x-rays), and, they are expensive.
Wow
If you were a Dead Bear, which color would you be?
Oh so this is how the masks are made... it is like the chicken egg problem, you would need masks to make the masks, but with this you do not need a mask, but it looks quite slow process
Ok, so it’s a slow process, who cares?
I don't get why do you go to school anymore, clearly they don't know 10% of what you're talking about.
They do actually, but unfortunately all this fun stuff is for the graduate students, and usually you have to specialize in one area. The lab I was in (physics department) made electronic devices and tested them at millikelvin. There was a whole giant new building devoted to nanofab. They had a fancy electron microscope that also had a ion beam that could cut the samples and then scan the new surface. The downside: you had to be certified to use the nanofab, which required $10,000.00 that usually comes from your professors research budget. I tried, I was unable to get my professor's sponsorship.
You are millennial applied science.
Gen z baby
Amazing