Lithography tool package training 3 - Exposure
ฝัง
- เผยแพร่เมื่อ 30 ก.ย. 2024
- The second step in photolithography is to expose the resist film, in order to transfer a mask pattern into the resist.
Topics in lecture video:
• Exposure principle
• Spectral sensitivity
• Exposure dose
• Exposure hardware
• Common problems