Lithography tool package training 3 - Exposure

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  • เผยแพร่เมื่อ 30 ก.ย. 2024
  • The second step in photolithography is to expose the resist film, in order to transfer a mask pattern into the resist.
    Topics in lecture video:
    • Exposure principle
    • Spectral sensitivity
    • Exposure dose
    • Exposure hardware
    • Common problems

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