DTU Nanolab
DTU Nanolab
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Lithography tool package training 6 - Post-lithography steps
มุมมอง 2683 หลายเดือนก่อน
In this video we will look into some of the things that may take place after the lithography process is finished. In the context of photolithography, this is usually after the development step. Topics in lecture video: • De-scumming • Hardbake • Resist stripping • Pattern transfer • Sample inspection
Lithography tool package training 5 - Resist, substrates, and pre-treatment
มุมมอง 2093 หลายเดือนก่อน
In this video we deepen our understanding of the photoresists and substrates we can use. We also look into some of the pre-processing methods used for improving wetting and adhesion. Topics in lecture video: • Photoresist • Substrates • Pre-treatment
Lithography tool package training 4 - Development
มุมมอง 2063 หลายเดือนก่อน
The third step in photolithography is to develop the exposed resist. The development will remove parts of the resist, revealing the mask pattern in the resist. Topics in lecture video: • Development principle • Development methods • Developer chemistry
Lithography tool package training 3 - Exposure
มุมมอง 2543 หลายเดือนก่อน
The second step in photolithography is to expose the resist film, in order to transfer a mask pattern into the resist. Topics in lecture video: • Exposure principle • Spectral sensitivity • Exposure dose • Exposure hardware • Common problems
Lithography tool package training 2 - Coating
มุมมอง 2523 หลายเดือนก่อน
The first step in photolithography is to apply a photosensitive coating, known as a resist, to the substrate. Topics in lecture video: • Spin coating principle • Resist composition • Spin coating phases • Spin curve • Soft baking • Cooling • Common coating problems • Edge bead
Lithography tool package training 1 - Introduction
มุมมอง 2973 หลายเดือนก่อน
Introduction to photolithography for cleanroom semiconductor fabrication. Topics in lecture video: • What is photolithography • Basic process steps • Common tools and parameters
CleWin 5 introduction
มุมมอง 3205 หลายเดือนก่อน
A short introduction to the CleWin 5 mask layout software
Cleanroom safety building 346
มุมมอง 5015 หลายเดือนก่อน
Introduction to safety at DTU Nanolab - a short description of how the cleanroom works and the safety issues you will meet.
Dry Etch TPT Lecture - 6 Equipment for dry etching at Nanolab
มุมมอง 7666 หลายเดือนก่อน
In this video we give you an overview of the dry etch equipment we have here at DTU Nanolab. The overview is given in LabAdviser where you can always take a look at the updated version - if you have access to LabAdviser.
Dry Etch TPT Lecture - 5b Chamber conditioning and RF matching
มุมมอง 9406 หลายเดือนก่อน
In this video we describe the importance of chamber conditioning and the importance of good RF matching.
Dry Etch TPT Lecture - 5 Process tuning - process parameters
มุมมอง 1.3K6 หลายเดือนก่อน
In this video we discuss the different equipment settings like chamber pressure, power to the plasma, gas flows and temperature and how they influence the etch characteristics.
Dry Etch TPT Lecture - 4 Etch Characteristics
มุมมอง 1.4K6 หลายเดือนก่อน
In this video some of the etch characteristics is discussed - that is, the result of the etching on the sample being etched. We look at the etch rate uniformity over the sample with respect to structure sizes and etch loading area. We also look at different etching profiles and discuss etch selectivity between different materials.
Dry Etch TPT Lecture - 3b The Bosch process
มุมมอง 1.7K6 หลายเดือนก่อน
In this video an etch mechanism called the Bosch process is explain in details. This is a passivation mechanism that is very important in silicon etching, especially deep silicon etching.
Dry Etch TPT Lecture - 3 Etch Mechanisms
มุมมอง 1.4K6 หลายเดือนก่อน
This video explains the etch mechanisms in plasma etching/reactive ion etching. First the chemical etch mechanism is explained and how to select the process gas(es). Then the physical and reactive ion mechanisms are explained and the role of the ions in these mechanisms. At last an introduction to the passivation mechanisms is given.
Dry Etch TPT Lecture - 1 Motivation
มุมมอง 1.3K6 หลายเดือนก่อน
Dry Etch TPT Lecture - 1 Motivation
Dry Etch TPT Lecture - 2 Etch plasma and equipment layout
มุมมอง 1.3K6 หลายเดือนก่อน
Dry Etch TPT Lecture - 2 Etch plasma and equipment layout
Dry Etch TPT Lecture - 0 Introduction to Dry Etch Equipment
มุมมอง 2.6K6 หลายเดือนก่อน
Dry Etch TPT Lecture - 0 Introduction to Dry Etch Equipment
Dry Etch TPT Training - ASE and AOE software: #4 The Bosch process
มุมมอง 4186 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #4 The Bosch process
Dry Etch TPT Training - ASE and AOE software: #7 Process log
มุมมอง 3486 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #7 Process log
Dry Etch TPT Training - ASE and AOE software: #6 Removing a wafer from the load lock
มุมมอง 3396 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #6 Removing a wafer from the load lock
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
มุมมอง 4146 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
มุมมอง 4706 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
มุมมอง 4696 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
Dry Etch TPT Training - ASE and AOE software: #1 intro
มุมมอง 5986 หลายเดือนก่อน
Dry Etch TPT Training - ASE and AOE software: #1 intro
Dry Etch TPT Training - ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
มุมมอง 3906 หลายเดือนก่อน
Dry Etch TPT Training - ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
Dry Etch TPT Training - ICP’s and Pegasus software: #1 Overview
มุมมอง 5806 หลายเดือนก่อน
Dry Etch TPT Training - ICP’s and Pegasus software: #1 Overview
Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes
มุมมอง 5156 หลายเดือนก่อน
Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes
Dry Etch TPT Training - ICP’s and Pegasus software: #3 Running processes
มุมมอง 4426 หลายเดือนก่อน
Dry Etch TPT Training - ICP’s and Pegasus software: #3 Running processes
Dry Etch TPT Training Introduction to wafer loading and temperature controller
มุมมอง 1.3K6 หลายเดือนก่อน
Dry Etch TPT Training Introduction to wafer loading and temperature controller

ความคิดเห็น

  • @JohnsonZhang-t8k
    @JohnsonZhang-t8k หลายเดือนก่อน

    very helpful!

  • @mariaa.2240
    @mariaa.2240 4 หลายเดือนก่อน

    Thank you very much for these lectures! I am a PhD student and working in clean room. This is so much valuable! 😊

  • @leciacburle6333
    @leciacburle6333 5 หลายเดือนก่อน

    Hi, thank you very much for the nice video. Is there a way to store also the U,V (or X,Y) position of the picture in the image, for example in the title?

  • @jiggysiggy
    @jiggysiggy 5 หลายเดือนก่อน

    so good

  • @Rocky-kf2mh
    @Rocky-kf2mh 7 หลายเดือนก่อน

    Great explanation and presentation. I have a small question, As you mentioned about coating imperfections like comets, streaks and non - uniformity etc; what are the different ways to visually inspect the wafer as the coating resin is clear liquid it will be really hard to differentiate before and after coating? how can we visually inspect the failure modes of coating? If you could answer that would be greatly appreciated. Thanks

  • @sushilkumar-gk6xw
    @sushilkumar-gk6xw ปีที่แล้ว

    thanks a lot for a detailed explanation sir.

  • @LeNiu-nn2hm
    @LeNiu-nn2hm ปีที่แล้ว

    very helpful!

  • @prashantbisht6384
    @prashantbisht6384 ปีที่แล้ว

    Its a piece of beauty 😅

  • @prashantbisht6384
    @prashantbisht6384 ปีที่แล้ว

    Nice video 😊

  • @filiptopic3721
    @filiptopic3721 ปีที่แล้ว

    Hi, and thank you for making your safety videos available to the public - these are a fantastic resource! I wanted to ask about the gloves you use, are they the North Silver Shield ones and how do you ensure the cleanroom compatibility, do you pre-clean them or can you use them as provided by your vendor?

  • @KawdoruTaon
    @KawdoruTaon ปีที่แล้ว

    This woman should be a professional tutorial maker. All her videos are very well explained.

  • @codenamehalf8326
    @codenamehalf8326 ปีที่แล้ว

    Lihography is such an interesting topic!

  • @aurobindadash4549
    @aurobindadash4549 ปีที่แล้ว

    How to unlock the data zone? Because in our system right click of mouse is not working in the process you discussed.

  • @chiragsharma5050
    @chiragsharma5050 ปีที่แล้ว

    I fall in love with this lab

  • @dr.nooralihasan6944
    @dr.nooralihasan6944 2 ปีที่แล้ว

    That was kind of you to record this video, It is very helpful. thanks a lot.🌹

  • @allresearchmahuva2440
    @allresearchmahuva2440 2 ปีที่แล้ว

    good new plant in india best reseach

  • @NawaDay-gb6dq
    @NawaDay-gb6dq 2 ปีที่แล้ว

    thanks for knowledge sharing.

  • @devinnemusemeche1273
    @devinnemusemeche1273 2 ปีที่แล้ว

    😉 ≋p≋r≋o≋m≋o≋s≋m

  • @CrocoduckRex
    @CrocoduckRex 2 ปีที่แล้ว

    Very helpful and concise. Thank you very much!

  • @bhadrame3755
    @bhadrame3755 2 ปีที่แล้ว

    Thnks

  • @bonaggi
    @bonaggi 2 ปีที่แล้ว

    Great video!

    • @chiragsharma5050
      @chiragsharma5050 ปีที่แล้ว

      This lab look cool do they teach corse in eglish

  • @geribbtes
    @geribbtes 3 ปีที่แล้ว

    Thanks for the heads-up! Next time, please more fancy animations :-)

  • @renjugaetec
    @renjugaetec 3 ปีที่แล้ว

    Very nice presentation

  • @zlli6278
    @zlli6278 3 ปีที่แล้ว

    many thanks !

  • @ywk7282
    @ywk7282 3 ปีที่แล้ว

    Thank you for the video I have a few questions. 1. I am wondering what exactly bleaching is? Is it a diffusion? 2. I am wondering what polarity change would do to allow to make pr 3. What does dose mean in 13:12? Dose is said throughout the lecture but I dont understand the exact meaning Thanks again for the lecture

  • @ywk7282
    @ywk7282 3 ปีที่แล้ว

    Thank you for the video 1.Does anyone know why SiOH is hydrophillic and SiH is Hydrophobic?? 2.and do we make the surface hydrophillic because hdms is also hydrophillic?

  • @markkraman886
    @markkraman886 4 ปีที่แล้ว

    This series of videos was really helpful, thanks a lot.

  • @alexanderwildish9483
    @alexanderwildish9483 4 ปีที่แล้ว

    Really helpful - very clear

  • @epowersofttechnology1549
    @epowersofttechnology1549 4 ปีที่แล้ว

    VERY GOOD

  • @cronopio12345
    @cronopio12345 4 ปีที่แล้ว

    Good lecture, thanks!

  • @ariadrou87
    @ariadrou87 4 ปีที่แล้ว

    Really helpful for refreshing our memories. Mange tak!

  • @رائدابوزيد-ع3خ
    @رائدابوزيد-ع3خ 4 ปีที่แล้ว

    very good presentation, can I know the name of the chemicals storage between the hoods and beside the shower???

    • @clausnielsen4903
      @clausnielsen4903 4 ปีที่แล้ว

      The chemical storage cabinets were custom made by the manufacturer of the fume hoods. It’s a German manufacturer called Arias. You can contact them at arias.de

    • @رائدابوزيد-ع3خ
      @رائدابوزيد-ع3خ 4 ปีที่แล้ว

      @@clausnielsen4903 thank you

  • @jinhoyun6891
    @jinhoyun6891 4 ปีที่แล้ว

    Hello, I am BRS TECHNOLOGY, a semiconductor company in Korea. I would like to know if you have DAD-321 and do you sell it. My email address is brsjh@brstech.co.kr

  • @xavcfh4253
    @xavcfh4253 4 ปีที่แล้ว

    Well done! I use this saw every day. Signed : a french from hell.

  • @TukerBiel
    @TukerBiel 5 ปีที่แล้ว

    What the difference between take a picture with pixel avg, line avg and continous avg?

  • @TukerBiel
    @TukerBiel 5 ปีที่แล้ว

    The aperture align and stigmation correction is always do in Pixel Avg?

  • @MerrittOutdoor
    @MerrittOutdoor 5 ปีที่แล้ว

    The plant I work at has 40000 gallons of it

    • @RoMan-lf8tc
      @RoMan-lf8tc 4 ปีที่แล้ว

      that stuff almost killed me, some bozo plant engineer connected a heated wet bench with 4% TMAH to a heat exhaust system, I got a lung full of vapor, ended up in the emergency room 3 days later, bp 188/118 at 130 bpm took 3 days to manifest, a little more and i would have had a heart attack, I`m lucky to be alive, do not underestimate the danger of this substance

    • @MerrittOutdoor
      @MerrittOutdoor 4 ปีที่แล้ว

      What plant were you at ?

    • @MerrittOutdoor
      @MerrittOutdoor 4 ปีที่แล้ว

      @@RoMan-lf8tc what plant was you working at ?

    • @RoMan-lf8tc
      @RoMan-lf8tc 4 ปีที่แล้ว

      @@MerrittOutdoor semiconductor plant in Palm Bay Florida

    • @MerrittOutdoor
      @MerrittOutdoor 4 ปีที่แล้ว

      @@RoMan-lf8tc I worked around it at a Basf chemical plant

  • @douro20
    @douro20 5 ปีที่แล้ว

    Are they required to have remote lockouts?

  • @grahamchadwick5242
    @grahamchadwick5242 5 ปีที่แล้ว

    where's your mask buddy?

  • @arnabkemi
    @arnabkemi 5 ปีที่แล้ว

    Very helpful!

  • @jhyland87
    @jhyland87 5 ปีที่แล้ว

    Where's part 3?

  • @MeysamAkhtar
    @MeysamAkhtar 6 ปีที่แล้ว

    Great tutorial videos. Thanks for uploading.

  • @allenzha7556
    @allenzha7556 6 ปีที่แล้ว

    Nice Video, thanks !