Plasma Cleaning: Discover Microelectronics | Panasonic's Web Seminar

Panasonic’s PSX307 Plasma Cleaner utilizes parallel plate plasma cleaning technology. Compared to conventional batch-type plasma cleaner systems, the parallel plate technology delivers superior etch uniformity.
The operator sets the magazine into the loader, then the substrates are transferred into the chamber. Plasma cleaning is performed and the substrates are unloaded into the unloader magazine.
Learn more about our plasma cleaning models: pfse.panasonic.eu/products/sm...

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if I had 4 rectangular preforms how to keep them away from merging and wetting making a big bulb in the middle