Etch Processes for Microsystems Fabrication - Part II

Etch processes Part II covers the basics of dry etch processes and describes several applications of dry etching for microsystems fabrication. Part I of etch processes covers the types of etch and the wet etch processes. This presentation is presented by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (scme-nm.org).

[@07gurumech]

I found all your basic videos on Microsystem comprehensive and quite easy to understand the concepts. However, you could have explained the physics and chemistry behind the plasma generation, chemical reactions involved in different etch processes etc. Thank you for merging a colossal of material into less than half an hour long videos.

[@heyarno]

Thanks a lot, this presentation is very intuitive. Now I feel comfortable to try to make a microchannel plate at home. I had no idea how to make a deep funnel shape with wet etching. Now I know dry etching is the way to go.

[@evahelena86]

So helpful presentation. Thank you very much for spreading the knowledge

[@pisangsedapable]

Any specific reason why the V-groove is 54.7 deg during wet anisotropic etching?

[@AbdulRahman-ju8li]

Thank you, very clear explanation in this video! :)

[@abhiparikh24]

wow! that was really helpful :D thanks SCME

[@memsuniverse]

great explanation

[@fercarcas]

are you accepting PD (pos-doctoral) applications? where to find more?

[@bowu2094]

This is very helpful, thx

[@memsuniverse]

Thanks very much,

[@rock3tcatU233]

Thank you

[@jacobhammerle9751]

At the end 13:18 you are showing an SEM image of an example of DRIE with aspect ratios of 50:1
What kind of process is that? Is it Bosch?

[@matthiaspleil1314]

Jacob Hämmerle The process used to make the leaf springs in this image was most likely the Bosch process.

[@haemse]

Thx

[@BigArea_Bae]

So So helpful

[@宝宝-n8q]

Thanks very much, Now I know I a DMD is made.

[@scottscheers2118]

I love you so much.