FEI Philips Electron Microscope SF6 refill after FEG Exchange

[@garybrake]

Hi Guys, thank you both for the responses. Helped me out a lot.

[@garybrake]

Hi, wondering if you reclaim the SF6 gas and how you go about it. I have been asked to look into how this is handled for TEMs and EBL systems. Thanks.

[@johnmitchell5472]

We don't reclaim the SF6 since it's such a small amount of gas lost.

[@semionbarlow3705]

Hi Gary, For the large volume of SF6 in our TEM we can compress the SF6 back into the bottle and save it for refill. It requires an oilless compressor to prevent contamination. The challenge is having the correct hardware to adapt the instrument to the compressor. Kevin