[Electronics] Various analysis of FinFET structure

“Various analysis of FinFET structure”
Available tools for this measurement are :
FE-SEM
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FIB-SEM
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Aberration Corrected STEM
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For details of each application, please see the description at following site:
① High accelerating voltage SEM of 14 nm SRAM FinFET
• [Electronics] High acc...
② FIB-SEM tomography of 14 nm FinFET
• [Electronics] FIB-SEM ...
③ Site-specific TEM lamella prep of 14 nm FinFET using Real-time STEM on L-shape FIB-SEM
• [Electronics] Site-spe...
④ APT sample prep of FinFET using FIB-SEM/STEM
• [Electronics] APT samp...