Introduction to Sputter
ฝัง
- เผยแพร่เมื่อ 6 มิ.ย. 2024
- Nanotechnology: A Maker's Course
Sputter Basics
Link to the full Coursera course: www.coursera.org/learn/nanote...
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The Shared Materials Instrumentation Facility (SMIF) is the Pratt School of Engineering’s core facility that enables materials, devices, and integrated systems research at Duke University in a variety of fields that include nanotechnology, biomaterials and biomedical engineering, information sciences, optoelectronics, sensor technology, and renewable energy. SMIF is housed in the Fitzpatrick Center for Interdisciplinary Engineering, Medicine and Applied Sciences (FCIEMAS). The facility consists of 7,000 square feet of clean room fabrication space, and nearly 3,000 square feet of specialized laboratory space for characterization and imaging equipment. SMIF is part of the Research Triangle Nanotechnology Network (RTNN) in partnership with similar facilities at North Carolina State University and the University of North Carolina at Chapel Hill. The RTNN is one of 16 organizations nationwide that comprise the National Science Foundation sponsored National Nanotechnology Coordinated Infrastructure (NNCI) program.
SMIF is open to all trained students, staff, faculty, and researchers and is used for both research and educational purposes. SMIF has nearly 700 users, of which 2/3 come from Duke University and 1/3 come from external academic institutions or industry. SMIF staff trains students and researchers to use the lab equipment and instruments themselves, and provides guidance and support in developing processes and methodologies that utilize these capabilities. Alternatively, SMIF staff can run samples for researchers as a service. SMIF also coordinates various educational and outreach activities. - วิทยาศาสตร์และเทคโนโลยี
awesome concept explanation with very good demonstration.!!!
Fantastic instructional video, i'll be showing it to my MicroElectroMechanical Systems (MEMS) students at Lorain County Community College. We teach them how to be a sputter operator in our cleanroom this is always helpful in the early parts of the associates degree. Thanks much, and well done!! ~Johnny V
I would feel offended if i was shown a video that treats me like a 10 year old instead of a proper lecture.
very effective explanation thank you. Please also explain the sputtering variants.
So happy to see such content presented so elegantly. Thank you for your effort. It was very useful for me.
I'm ecstatic to see such content presented in such a wonderful way. You have my appreciation for your efforts. It was quite beneficial to me in many ways.
bundle of thanks for this video 👌
謝謝你們的教學
very informatic and clear explaination. Thank you😍😍😍
Of course, glad it was helpful!
thank you duke university
Superb 👍
Excellent explanation !
Thank you!
Thank you!
Very very very informative and clearly explained
Glad it was helpful!
Vividly, great job! Thanks for this clear demonstration.
Please elaborate mechanism of interaction between ionization and nature of collisions between positive Ar ions and target.
Regards
10:35 Does varying the negative voltage also affect the sputter flux in addition to the shutter position? Or is the voltage only effective in a specific window? If sputtering was performed for the reverse process, like sandblasting to clean a surface; would a specific voltage achieve selective un-deposition of an element? Or do the Argon ions just crash and thrash any atom from the substrate?
We are lucky to be able to see these videos for free
Glad you enjoyed them!
thanks for sharing
A very wonderful and interesting explanation 👍🏻👍🏻👍🏻. I have a question. What is the cause of the phenomenon of plasma formation, is it the charged atoms of argon gas, or the process of its collision with the target, or when the target atoms are removed, or is it the result of the three operations together, and thank you very much for this beautiful explanation 😊
Amazing thanks for this video...
Most welcome 😊
Thank You
More than Great
Nice video with the handeling of the machine, substrate and inputs.
Very cool.
What voltage is required to form the plasma?
Depends on the pressure of the system, but it ranges in the many hundreds to roughly a thousand volts. Also the plasma initiation voltage is higher than the voltage required to sustain the plasma in most cases, so a striking voltage is used similar to how tig welders have a high frequency start.
Wonderful presentation! I came across this question and I want a better explanation to it. Why is it a bad idea to use a metallic zinc as a substrate holder ?
The zinc in the holder, could also act as a target and contaminate your thin layer.
Thanku
how do you guys keep the inside of the machine so clean? we use e beam deposition and coat the inside with tin foil to protect the walls, which we change every month or so
We install removable metal panels called “shields.” The shields are coated with textured aluminum film (deposited via flame spray technique by a commercial supplier). All the materials we deposit build up on the shields. The textured aluminum coating prevents the materials from flaking / peeling. Every few months we replace the shields. The old shields are sent to a commercial vendor, where the aluminum and all deposited materials are chemically removed and collected for recycling. The used shields are then cleaned and re-coated with aluminum and sent back to us for re-use.
Great question. Very interesting answer. I did not know about flame coating aluminum. Cheers!
Oleeeee oleeee y oleeeee
we are manufacturer of magnetron sputtering source for pvd coating machine.
y aún no encuentro el voltaje con el cual estoy haciendo los depósitos 😂😂😂😂😂
looks like a machine made in a garage workshop