Step-by-step guide to operate SUSS Microtec's RCD8 Developer

RCD8 is a coater and developer platform for the processing of various substrate materials and shapes. These range from square substrates measuring up to 150 x 150 mm and standard wafers up to 200 mm to special shapes up to a maximum size of 200 mm. In its developer setup, the RCD8 can be configured as a puddle or spray developer.
The RCD8 includes a manual centering system for the simple handling of substrates. A large touchscreen and the tried and tested MMC software from large-scale production ensure that the operator has full control at all times and can directly monitor the ongoing processes. A simple-to-use recipe editor allows for recipes to be composed and managed flexibly. Recipes developed in the RCD8 can also be transferred to the fully automated coater and developer systems of the ACS200 platform.
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