Royce Deposition Suite at the University of Cambridge

A part of the Royce Cambridge Physical Vapour Deposition and Characterisation Facility, a state-of-the-art technology platform allowing for physical vapour deposition.
The equipment allows for the synthesis of epitaxial, polycrystalline and amorphous thin films from monolayer to hundreds of nanometres. It has a high through-put Direct Current/Radio Frequency magnetron sputtering chamber with 11 targets. Also, an ultra-high vacuum e-beam evaporator is available for access.