Vibration Control for Semiconductor Facilities and Equipment

This webinar will cover active vibration cancellation technologies for controlling both tool-generated vibration and facility floor vibration in semiconductor manufacturing. As semiconductor manufacturers seek to produce ever-smaller node sizes, vibration control becomes an increasingly important factor in yield, failure analysis, and throughput. Fabs must consider the effects of facility floor vibration as well as tool-generated vibration on tool performance, for both front-end and back-end processes.