Simulation of Arc-PVD Coating Processes

Arc-PVD processes are hard to calculate because of the stochastic character of the arc spot motion. A semi empirical approach allows the simulation of the arc spot motion based on materials- and process data. So the target erosion profile is simulated and can be used for optimization of target utilization. On the other hand, spot behaviour is used to calculate the plasma propagation and the coating deposition profile. So an optimization of fixture design and chamber filling of industrial coating processes will be possible in the future.