Design and Simulation of Humidity Sensor using Maxwell 3D & Ansys Mechanical - Parametric Modeling

Design and Simulation of MEMS Based Interdigitated Capacitive Humidity Sensor with Shielding Electrode.
1. Parametric Modeling
2. Multiphysics
3. Maxwell 3D, Steady State Thermal, Static Structural
4. Sensor Design
In this project, we have designed and simulated a MEMS based interdigitated capacitive humidity sensor with shielding electrode that is compact, economical and efficient. Multiphysics modelling approach is used to analyze the performance of sensor from different aspects. For this purpose, Ansys modules: Maxwell 3D, Steady State Thermal and Static Structural are employed. The developed sensor is meant to work with frequency less than 10 MHz having sensitivity of 0.77 fF/ (%RH) and range of 0% to 100% RH (relative humidity).

[@sarperarslan3085]

Thank you for that record , it is really helpful

[@siratulIslamonlineislamiceduac]

👍👍👍

[@shwetagupta8704]

Can you please tell how to remove sensing layer coating from in-between finger spacing interdigitated electrodes? and will this sensing layer be upon the Interdigitated electrodes as well or it it's thickness will be equal to IDE thickness

[@mjin6093]

wet etch

[@kingmaker5014]

Can i get more useful tutorial???