Thanks a lot. You said, bilayer lift-off is the best, no need to use sonication. I think you said sonication is not good, why? Does sonication affect the LER (line edge roughness)?
Thanks for the good video! But I wonder if the e-beam resist is damaged due to SEM at 12:05. I think there is not any coating metal such as Pt at the cross-sectional plane. Could you answer it to me? Thanks in advance.
Thanks a lot.
You said, bilayer lift-off is the best, no need to use sonication. I think you said sonication is not good, why? Does sonication affect the LER (line edge roughness)?
Thanks for the good video! But I wonder if the e-beam resist is damaged due to SEM at 12:05.
I think there is not any coating metal such as Pt at the cross-sectional plane. Could you answer it to me? Thanks in advance.