032 PRIMS | New compact magnetron sputtering system
ฝัง
- เผยแพร่เมื่อ 2 ธ.ค. 2024
- Compact, simple and full functional magnetron sputtering deposition system for reproducible thin film layers applying. Magnetron sputtering sources (for metals and inorganics) are included, mounted in sputter-down configuration. The system includes a turbomolecular pump with manual throttle valve. The small size of the process chamber allows reaching the base pressure in a short time.
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