UIUC MRL MicroFab cleanroom walkthrough training video

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  • เผยแพร่เมื่อ 1 ต.ค. 2024
  • The MicroFab cleanroom is used for a wide range of micro and nano-fabrication projects. In addition to UIUC researchers, the cleanroom welcome outside academic users as well as users from industry.
    The MicroFab cleanroom is divided into 4 separate bays, each dedicated to a set of related fabrication processes:
    Optical lithography bay (MRL 388): two spin coaters, three hot plates, HMDS oven, MJB-3 mask aligner, MJB-4 mask aligner and Heidelberg MLA 150 Maskless Writer.
    Sample cleaning and developing bay (MRL 384): solvent fume hood, developer fume hood and microscope.
    Metal etching bay (MRL 387): metal etchant fume hood, Deep UV exposure, UV flood exposure unit and microscope.
    Acid etching bay (MRL 359): HF/BOE fume hood, Nano-strip fume hood, other acids fume hood and microscope.

ความคิดเห็น • 1

  • @faelgonalves
    @faelgonalves 2 ปีที่แล้ว

    Great training video! Congratulations!