We usually use the Ion Implantation to dope our wafer, however, it is the very definition of doping that we need "atoms" not "ions" Can someone clarify this for me?
During ion implantation, electrons are supplied through the chuck to the back side of the wafer, where they travel up and turn the ions into neutral atoms.
Thanks for your reply! But, how are the electrons gonna travel up to the ions if their path is not the same as the ions, I mean the path of particles depends on the masses, the angle and scattering and all of these parameters, the electrons don't encounter the same scattering profile and have different masses from that of the ions, therefore they won't necessarily end up at the same positions as the ions and won't necessarily neutralize them!
The electrons are at zero energy (thermal energy, actually). They simply conduct up from the bottom of the wafer as current through a wire. The positive ions (which are not mobile) attract the electrons (which are highly mobile).
At what point are the ions neutralized? Before or during or after anneal? Does "anneal" mean the solid phase epitaxial regrowth process or the neutralization process?
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May I ask in what state or form are the elements used during Ion Implantation process? for example if I were to use Molybdenum as an implanter.
The only requirement is that the material be ionized.
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We usually use the Ion Implantation to dope our wafer, however, it is the very definition of doping that we need "atoms" not "ions"
Can someone clarify this for me?
During ion implantation, electrons are supplied through the chuck to the back side of the wafer, where they travel up and turn the ions into neutral atoms.
Thanks for your reply!
But, how are the electrons gonna travel up to the ions if their path is not the same as the ions, I mean the path of particles depends on the masses, the angle and scattering and all of these parameters, the electrons don't encounter the same scattering profile and have different masses from that of the ions, therefore they won't necessarily end up at the same positions as the ions and won't necessarily neutralize them!
The electrons are at zero energy (thermal energy, actually). They simply conduct up from the bottom of the wafer as current through a wire. The positive ions (which are not mobile) attract the electrons (which are highly mobile).
At what point are the ions neutralized? Before or during or after anneal? Does "anneal" mean the solid phase epitaxial regrowth process or the neutralization process?
thank you so much!
thanks
eqn 12:10